Design and Simulation of a Piezoresistive Mems Pressure Sensor for Marine Applications

"This paper reports on the design and simulation results of a silicon bulk-micromachined diaphragm-type piezoresistive pressure sensor capable of operating linearly over a wide dynamic range (0-1000 meters of water). The piezoresistor elements of the sensor are arranged in a wheat stone bridge configuration to achieve a higher output response. Simulation results (output voltage and sensitivity analysis) obtained using coupled MemPZR-MemMech module of the CoventorWare2003 Finite Element tool are presented. The effect of diaphragm size, diaphragm thickness and thickness of the piezos on output sensitivity were analyzed and optimized to get a linear response over the wide dynamic range.IntroductionThe physical and biological processes in the ocean are critically influenced by ocean parameters (pressure, salinity and temperature). Thus there is a need to develop inexpensive and reliable sensors to continuously measure large volumes of sea-space over long time spans. A key component in any such system will be a pressure/depth sensor. This sensor is routinely employed in marine applications such as wave and tide gauges, tsunami detection, platform leveling etc. More significantly, pressure measurement is needed for depth determination. Depth sensors are vital for remote operated vehicles (ROVs), profiling instruments and towed arrays.Several techniques have been routinely used in the past to measure pressure in the marine environment [1-3]. In general, the pressure sensor design is based on a flexible membrane as the spring element for the sensing pressure [4]. The deflection of the membrane, induced by the applied pressure, is converted into an electrical output through a component that is sensitive to diaphragm deflection (capacitive coupling) or associated stresses (piezoresistors, strain gauges). The temperature compensated pressure measurement can be readily converted to depth using"