Design of an Asymmetric Waveform Spectrometer

"A design for a handheld MEMS chemical detector is proposed. The detector will be used to detect trace amounts of chemicals in air. It can detect drugs, toxic chemicals and/or explosives. The proposed detector will use ion mobility spectrometry (IMS), a technique that is well known for accuracy and has been used in the past in suitcase sized chemical detectors. The separation and detection of the chemicals occurs in the drift channel and the process was modeled using the finite element method and CoventorWare modeling software. A manufacturing process sequence for the drift channel is proposed and was demonstrated.IntroductionThe goal of this effort is to design, mode~ and prototype a MEMS chip that will be the key component in an ion mobility spectrometer (IMS). This technique uses and asymmetric potential to separate the various ion species in a stream of incoming air [1-4]. One advantage of IMS is its ability to separate chemical species from air at atmospheric pressure and temperature. This is a requirement for a simple to use handheld drug or chemical detector. IMS can be used to detect drugs, toxic chemicals and explosives and it is well known for accuracy in detecting very small amounts of chemicals. This chemical detection technique has been used in the past, but not in handheld detectors.One variant of IMS is the high-field asymmetric waveform ion mobility spectrometry or FAIMS [3]. The FAIMS process, shown in Figure l, works as follows: a gas sample is admitted into the instrument where gas molecules are ionized, typically by a weak radioactive isotope source, ultraviolet light source; and more recently through field emission. The ions move along the length of a channel while they are separated in the transverse direction by an asymmetric electrical potential. The potential, in the form of an asymmetric waveform, causes relative motion between the various chemical species. The species that hit the charged top and bottom plates are neutralized and only those ions that move along the center are detectable as charged chemical ions at the end of the channel."