Plasma-Arc Zone Refining of Silicon

"Purification of metallurgical grade silicon (MG-Si) by the plasma-arc zone melting method (PZM) has been examined. The process consisted in the horizontal displacement of a molten zone heated by Ar- and 10%H2+Ar- plasma-arc under atmospheric pressure. This technique, especially using hydrogen plasma-arc, promoted the segregation of impurities from the head to the tail of the bar and the vaporization of impurities of higher vapor pressures. Metallic impurities such as Fe, Ti, Cr, Mn,. Cu, Al and Ca were reduced to less than 1 mass ppm at the head side of the Si bar. Non-metallic impurities such as boron, phosphorous, carbon and oxygen were also reduced by the zoning effect and, furthermore, by activated hydrogen atoms dissociated in the high temperature plasma-arc according to the following reaction: Q (in liq.Si) + 2H = H20. Plasma-arc zone melting with hydrogen plasma has been recognized to become an effective purification technique of MG-Si for the production of a low cost solar grade Si (SOG-Si).IntroductionDemand of high-purity Si for solar grade silicon (SOG-Si) is supposed to be further growing in the near future. The purity of SOG-Si required for the photovoltaic cell is more than six nines. An expensive semiconductor grade silicon (SEG-Si) with the purity of around eleven nines has been used to satisfy the demand. Development of techniques and processes for the production of a low cost SOG-Si is therefore necessary [l]. Although many purification techniques, such as directional solidification, plasmaarc melting and electron beam melting [1-6], and processes, such as carbothermic reduction of high purity silica [7], have been examined and proposed for this purpose, a more efficient and practical purification technique is still required.In the present work, the purification of MG-Si has been investigated using a plasma-arc zone melting (PZM) technique developed by the authors. Plasma-arc melting, which is well· known as a useful melting method for various metals and alloys, has been recognized to be efficient for refining and degassing several metals if hydrogen is added to the plasma generating gas, resulting in the so-called hydrogen plasma-arc. For example, deoxidation of Fe, Co and Ta [8,9], decarburization of Fe [9] and removal of metallic impurities from Zr, Ta and Fe [10-12] have been reported. This excellent refining effect is considered to be caused by dissociated and activated hydrogen atoms formed in the high temperature plasma-arc."