Plasma Enhanced Chemical Vapor Infiltration (PE-CVI)

A novel method for Chemical Vapor Infiltration (CVI) using plasma technology is proposed, Plasma Enhanced CVI (PE-CVI). Due to the low rates at which CVI is currently performed, the use of plasma as a source of heat may be considered to be a faster and less expensive production method. Precursors fed in the hot region of the plasma gas are completely vaporized and forced by the same flow through a porous preform where it condenses as a new material. In this research, silica and methane where used as precursors to form SiC/on a / graphite felt (preform). To enhance the infiltration process, vacuum was used to increase the flow through the preform. Characterization of infiltrated graphite was perfontied using Scanning Electron Microscopy (SEM) and X-Ray Diffraction (XRD). A uniform distribution of Sic was observed along the felt with only twenty minutes of infiltration process, yielding a 178% increment in weight.