Preparation and Optical Properties of Aluminum Fluoroberyllate Glasses

"Preparation and vacuum ultraviolet (VUV) transmission spectra of aluminum fluoroberyllate glasses, MgF2-CaF2-SrF2-A1Fr BeF2 (MCSA-Be) and MgF2-CaF2-SrF2-AlFrYFrBeF2 (MCSAY-Be), were studied. The influence of YF3 and BeF2 on the thermal stabilization against crystallization and VUV transmittance was investigated. With increasing the BeF2 content, the crystallization tendency decreased and the absorption edge shifted to shorter wavelength in the MCSA-Be and MCSAY-Be glasses. The MCSA-20Be glass composition exhibited the shortest wavelength UV absorption edge (-147 nm) and the highest transmittance at 157 nm (60% for 2 mm sample thickness). The transmission values at 157 nm and the slope (steepness) of the absorption edge were found to be significantly influenced by the trace amount of Fe2+ derived from the BeF2 raw materials.IntroductionPure beryllium fluoride is known to be an only fluoride that forms one component glass on cooling from the molten state and is structurally similar to silica with [SiO4]4- tetrahedra. Molten BeF2 is highly viscous with a viscosity of about 106 poise near its liquidus temperature at 550""C[l]. The addition of modifying fluorides such as LiF, NaF or KF to BeF2 substantially decreases the viscosity[2]. Glass forming region of binary fluoroberyllate glasses has been mainly reported by several authors [3]. LiFBeF2 binary system is structually analogy for Mg0-Si02 system from their phase diagram and ratio of ionic radius for each cation and anion, respectively. LiF-BeF2 binary glasses seems to be promising candidates for the extreme deep vacuum ultraviolet (VUV) transmitting optical materials owing to their larger band gap. However, it is chemically unstable, and so, have no practical application for lens systems in micro lithography equipments and substrate materials for F2 (157nm) excimer laser[4]. There are also few reports on the VUV transparency of multicomponent aluminium fluoroberyllate glasses from the view point of their compositional dependencies. The purpose of this paper is to prepare deep VUV transmitting optical materials and determine the optimum glass compositions for aluminium fluoroberyllate glasses investigating their thermal stabilization against crystallization."