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By P. A. Distin, Jr. da Silva

The history of commercial processes for zirconium/hafnium production and separation is reviewed. A new technology is then proposed as a potential alternative for zirconium/ hafnium separation in a simpler, cleaner way than achieved with current processes. Primary sources of zirconium always contain small amounts of hafnium that must be removed during production of zirconium metal for nuclear applications. This separation is usually carried out by a solvent extraction process, developed in the 1950s, that selectively extracts hafnium, as a thiocyanate complex, using methyl isobutyl ketone (MIBK). Environmental problems inherent to this process are the high aqueous solubility and low flash point of MIBK, and possible gaseous contaminants formation generated by the decomposition of the thiocyanic complexes in hydrochloric acid medium (H2S, HCN, mercaptan’s formation). The present work shows how these problems could be avoided by using organophosphorous extractants that were unavailable when the MIBK process was developed.

Jan 1, 1998

By Wael Abdellah

Mine haulage drifts are the primary access to the mining blocks of an orebody in a multilevel mining system of a tabular ore deposit. The stability and functionality of haulage drifts are thus crucial to the success of a mining operation. Drift instability could lead to serious consequences such as injuries, production delays and higher operational cost. In this paper, the performance of the haulage drift stability is evaluated on the basis of the primary rock support system comprising 1.8 m resin grouted rebars in the drift walls and 2.1 m long bolt in the back. Two failure criteria namely the extent of Mohr-Coulomb yield zones around the drift, and linear elastic brittle shear failure are adopted and compared, with respect to lower level and same-level mining and filling sequence in the vicinity of the haulage drift. The case study is one of the #1 Shear East zone of the Garson Mine in Sudbury, Ontario. Random Monte Carlo (RMC) technique, which has been previously established to assess the haulage drift stability, is employed in this investigation. The RMC technique is used in conjunction with finite difference modelling software FLAC for random assignment of model input parameters in the FLAC grid. Deterministic model results reveal the drift behaviour in terms of deformation (convergence) and mining-induced stress distribution. Comparison between the two different criteria is carried out to determine which method is most suitable in evaluating unsatisfactory drift performance. The results are presented in terms of probability of instability and categorized with respect to failure condition and mining step. It is shown that the brittle shear failure condition based on linear elastic response calls for enhanced support system at a later mining step than what Mohr- Coulomb yielding condition does. The paper presents a detailed discussion of the stochastic analysis results.

Jun 1, 2012

By Robert H. Clark

Introduction During the last twenty years, science and industry have been strenuously endeavouring to discover new sources and new kinds of liquid fuels and to work out suitable chemical methods for their production. One of the new possibilities for the production of liquid fuel on a large scale is law-temperature carbonization of various grades of coal. The use of alcohol as motor spirit, in spite of its relatively low calorific value, is being widely investigated. Its production by fermentation of sugars, its recovery from the sulphite liquors of the paper industry, its production directly from wood and also from calcium carbide, have all been considered. At present the most promising line of investigation would appear to be the further development of those technical processes which yield liquid fuels from coal; since science has shown the possibility of preparing all kinds of liquid fuels and even the complete conversion of coal into oils. The present paper will consider briefly: 1. The production of primary tar by low temperature carbonization of coal. 2. The hydrogenation of coal. 3. The synthetic processes of Dr. Franz Fischer.

Jan 1, 1928

By L. E. Collins

"In western Canada, many new wells contain a significant fraction of H2S. As well, many older wells become increasingly sour over their operating lifetime. For these reasons, there has been increased demand for linepipe and casing for sour service applications in recent years. This paper will review the metallurgical factors which must be considered in designing steels for such applications. IPSCO’s development of linepipe and casing, and experience in fabricating products to meet test standards specified for sour service applications will be summarized. IntroductionWestern Canada produces the majority of Canada’s domestic crude oil and natural gas. A complex system of pipelines has been built to gather the oil and gas from the fields for transport to refining and/or cleaning operations. The gas carried in these pipelines can be either sweet or sour (i.e. containing no H2S or containing H2S) depending on the nature of the field from which it came. Many new fields contain a significant fraction of H2S and many older fields become more sour as their time in production increases. This uncertainty regarding product condition influences the user’s choice of materials for both casing and pipeline applications.It is well known (Merrick, 1989) that hydrogen induced cracking (HIC) will occur in steel when three conditions exist simultaneously: (1) the presence of H2S gas, (2) moisture, and (3) a susceptible material. Steelmakers can only address the latter of these factors. Development of steels to meet test requirements of sour service has been a major focus of IPSCO’s development work for several years."

Jan 1, 1998

By P. Mageau-Béland, È. -M. Proulx, M. -C. Patoine

Over the past six decades, Hatch has helped several industrial processing facilities in debottlenecking their operations, allowing them to produce more with the same equipment, to reduce and even eliminate expenditure investments, or to increase the return value of their expansion projects. These successes result from the application of a proven analysis approach that can be applied to any industrial facility. A five-stage methodology is discussed and demonstrated with a specific example of a nickel concentrator optimization study. The first stage is an observation stage which allows to meet key actors at the plant, develop mutual understanding of problems, understand operating philosophy, and efficiently collect large amounts of operating and maintenance data. Following is a data compilation stage during which data is analyzed over a representative time period to identify parameters that significantly affect the production, to evaluate data reliability and to define the focus of the upcoming analysis. Quantitative metrics are defined using statistical tools such as pivot tables, histograms, percentiles and MDR (Maximum demonstrated production rate during 3 to 7 consecutive days). Then, the production bottlenecks are identified by a thorough analysis of the facility’s control philosophy, process throughput, equipment capacity, availability, downtime causes, and interaction between components of each circuit. Understanding the maintenance practices and frequency of planned shutdown is also critical to this analysis. Opportunities for improvement are identified in collaboration with the operation, maintenance and engineering teams, ranked as a function of their impact on the bottlenecks and prioritized. The final and most critical stage involves engagement with the plant stakeholders, namely the operators and the maintenance staff members, to present the results of the analysis and obtain their participation in the implementation of the solutions. The benefits of the case study translated into: 10% production capacity gain, improved maintenance planning and avoidance of several million dollars of investment.

Jan 1, 2016

By F J. Kelly

A chemical process, based on laboratory investigations, is proposed for the production of high-purity niobium oxide from a pyrochlore-perovsk1te flotation concentrate produced from ore obtained at the Oka, Quebec property of Columbium Mining Products Limited. The method developed included the decomposition and dissolution of the flotation concentrate with hot, concentrated sulphuric acid. The dissolved niobium was purified and concentrated by a solvent extraction step, using methyl isobutyl ketone as the extractant. The niobium was recovered from the extractant with ammonium fluoride solution from which niobium oxide was precipitated with ammonia. Finally, the filtered and washed precipitate was calcined. Ninety-six per cent of the niobium was recovered in a product analysing 99.9 per cent Nzo.. The reagent cost was in the range of $1.00 to $1.25 per pound of niobium recovered. Introduction OVER the past few years, Columbium Mining Products Limited has been engaged in the development of a niobium-bearing mineral deposit in the vicinity of Oka, Quebec. One phase of this program resulted in a flotation process capable of producing concentrates containing up to 50 per cent Nb205? Flotation pilot-plant

Jan 1, 1965

By T. Patching

"MINING operations at the Star Key Mine provided an example of a small-scale prairie-type coal mine that employed several interesting procedures and achieved good productivity with low capital expenditures. The mine was located about 11 miles north of the city of Edmonton, on the north side of the Sturgeon River valley. It opened in 1945 and operated until 1979. Output in the winters reached about 500 tons a day in the late 1940s, but in the spring and summer periods activity was usually limited to only servicing and development work. In the later years of the mine's life sales fell to less than 100 tons per day. Most of its output was bought for domestic use in furnaces and stoves so production of large sizes was desired. A modest market for stoker coal did exist for a time. Screenings (-5 / 8 in.) were sold to the city's power plant until it converted to natural gas and were also used for thawing frozen ground for work on pipelines. These markets were comparatively small and the small sizes did not command as high a price as did the larger sizes. However the extension of natural gas services to rural markets cut into the domestic heating market and finally led to closure of the mine. The coal was strong when freshly mined, but because of its high inherent moisture content, about 25%, it did not store well on surface but tended to disintegrate. It was of subbituminous Crank with a heating value of about 8000 Btu per pound and burned with a clean flame. The seam mined was in the Edmonton Formation, of Upper Cretaceous age, at a depth of 60 to 80 ft below the surface. The seam in the mine area was about 11 feet in thickness but thinned gradually to the north and south and split to the west (1). It was approximately horizontal but gentle rolls in the floor of several feet in height necessitated brushing in places to produce suitable haulage grades. The floor material was of bone and clay, overlying a thin layer of coal. Above the seam there were only a few feet of mudstones and weak sandy shales while the remainder of the overburden was clay and unconsolidated glacial till and surface soil. Because of the soft floor and weak roof material the miners usually left about a foot of coal in the floor to provide a firm working surface and about a foot of coal above the rooms and two feet of coal above the entries to provide a competent roof."

Jan 1, 1985

By A. Bendada, P. Servais, X. P. Maldague, C. Ibarra-Castanedo, C. Mohr

Infrared (IR) thermography is a nondestructive, non-contact and non-intrusive technique that allows the fast inspection of large and complex structures with limited accessibility. Pulsed thermography is particularly interesting for the inspection of aerospace materials such as composites given that, after submitting the specimen surface to a thermal front, the most common types of subsurface discontinuities (e.g. porosity, de laminations, dis bonds, fiber breakage and inclusions) can be detected with an IR camera as regions showing abnormal temperature patterns. We present first the case of an aircraft door with water ingress and surface repairs on its honey comb structure. We also highlight the advantages and limitations of thermography for the inspection of aircraft composite parts, such as edge flaps, rotor blades and speed breaks. Finally, we expose some results from a Kevlar® non-planar specimen with Teflon® inclusions at different depths and locations.

Jan 1, 2006

By T. Richard Davies

This paper primarily deals with the application of wearfacing materials and their role within a well-established preventive maintenance welding program. Some examples are shown, as well as a synopsis of possible benefits and a compendium of methods and materials.

Jan 1, 1979

By Yongjie Bu, Wei Sun, Zhiyong Gao, Yuehua Hu, Hongbiao Tao, Runqing Liu, Central South University

"The flotation behavior of O-isopropyl-N-ethyl thionocarbamate (IPETC) and pH for chalcopyrite and galena was studied through pure mineral test, adsorption quantity determination, solution chemistry calculation and Materials Studio simulation. The results show that the recovery differential value of chalcopyrite and galena is about 20% when pH of the pulp 9.5 and IPETC is 7×10-4 mol/L, the flotability differences of the two minerals is significant. There is competitive adsorption between OH? and IPETC on mineral surfaces, it lead to galena flotability is lower than chalcopyrite flotability. IPETC can remove the hydration layer on mineral surface and adsorb on active sites for collector adsorption, minerals have a better hydrophobicity.INTRODUCTIONCopper and lead are two of the most widely used metals in industrial and living, their applications include building construction, various metal alloys, heat and electricity, machine manufacturing (Zhang et al., 2014). Chalcopyrite and galena are the major source of copper and lead, normally they associated with each other. With the growing use of these resources, high grade and dissemination large particle sizes minerals are less and less, the use of low grade and complex dissemination minerals have to be paid more attention (Chen, Ye, & Li, 2010; Liu, Sun, Hu, & Wang, 2009). As the special properties and complex composition of copper-lead sulfide ore, flotation separation of chalcopyrite from galena effective is a research emphasis and difficulty point in mineral processing (Bruckard, Sparrow, & Woodcock, 2011).In the separation process of chalcopyrite and galena, it is rather important to choose effective collector (Huang, Wang, & Liu, 2014). Enlarging and using the two mineral flotability will be a good basis and start in flotation (Reyes-Bozo et al., 2014). Qin et al. (2013) made a great deal of research on flotation separation of copper/lead concentrate, collector O-isopropyl-N-ethyl thionocarbamate (IPETC), butyl xanthate (BX) and ammonium dibutyl dithiophosphate (ADTP) were investigated, BX and ADTP floated both chalcopyrite and galena well, specific adsorption appeared in the surface of mineral, the problem was the collectors were not selective enough, however IPETC showed better selective."

Jan 1, 2016

By Glenville A. Collins

IN 1932, Horace Onyett at Oroville, California, built a practical floating washing plant along the general lines as now known, using a 24 in. by 12 ft. trammel; it was fed with a ½ yard dragline bucket, rated then at 200 yards per day. Onyett dubbed his plant a 'Doodlebug' which name has clung to this type of operation ever since. In general, the 'Doodlebug' dredge is the outgrowth of the depression of 1929, wherein many dirt contractors had surplus idle equipment and a few of them ventured to use it for placer mining. Many such plants were impractical and poorly designed and adapted often to locations not suited to the purpose. However out of the general idea came refinements until today dragline dredging has a very definite place in the gold production of the world. Many of the early operators, being mainly contractors without mining experience or technical knowledge of gold saving, geology, or mechanical design, naturally went through stages of trial and error until a workable unit became standard practice. Credit should be given Bodenson Iron Works of San Francisco, who did a notable job of pioneering and building of floating washing plants; also, to Lord and Bishop, contractors of Sacramento, who were among the early operators, and to several others who built and rebuilt their plants until the weak spots were strengthened to take the beating required, and yet deliver a high degree of efficiency.

Jan 1, 1945

By C E. Gordon Brown

Aircraft utilization, weather and cost data are given for three separate projects north of the sixtieth parallel in the Northwest Territories and the Yukon Territory. These operations, carried out by helicopter-equipped geological and prospecting parties, have cost $24 to $30 per square mile, depending principally on the distance from the base. They provide adequate surface exploration of areas with 40 to 50 per cent rock outcrop. A good one-inch-to-one-mile geological map can be made. T HE exploration of the Canadian northland has been given increasing attention by the mining industry during recent years. In many cases, the initial problem is to make an adequate reconnaissance of a large area where existing geological information is meagre. The Geological Survey of Canada pioneered the use of helicopter-equipped geological parties for mapping at a scale of eight miles to the inch.

Jan 1, 1964

By N Berkowitz

Slurry pipelining, as now under-stood and practised, can only command marginal interest in Canada, as long-distance railway freight charges in this country are generally lower than slurry pipeline tariffs. Several alternatives to conventional slurry transmission are, however, now emerging, and two such alternatives are briefly discussed with reference to coal pipelining. In one, coal is transported as a suspension in oil; the other contemplates the movement of paste "slugs." Preliminary economic estimates indicate that the resulant process simplification and adoption of common carrier principles could lead to cost reductions that might make Western coal competitive with imported fuel in the power generating stations of eastern Canada. R ECENT appraisals of slurry pipelining techniques, some-what incongruously 'based upon the performance of successful installations (1,2), are making it increasingly apparent that current solids pipelining methods can only command marginal interest as methods of bulk commodity transportation (3). Although some uncertainties remain in matters of detail, it is now generally conceded that long-distance slurry pipelining cannot compete against rationalized railway transportation unless movement of

Jan 1, 1963

By K. Barbetti, J. Avraamides

"The processing of gold ores with high silver contents can provide operational challenges, such as high cyanide consumption, retardation of gold leaching and competition during adsorption stages of carbon-in-pulp/leach/column (CIP/CIL/CIC) circuits. In particular, the silver, which is about 1.5% of the value of gold, competes with gold during carbon adsorption due to its higher concentration in many Ag-Au ores, potentially leading to gold solution losses. Fresh and partially fouled (barren and regenerated) activated carbons were evaluated at various Ag:Au ratios and total metal concentrations with regard to the adsorption kinetics and equilibrium loadings. Conventional Freundlich isotherms were found to be highly inaccurate for predicting equilibrium loadings in the competitive adsorption environment. An integrated model, which incorporates competitive adsorption kinetics with a modified competitive adsorption isotherm model has been developed and validated using plant and laboratory data. The model performance and some of its salient features will be discussed.INTRODUCTIONThe processing of gold ores with high silver contents can present a range of operational challenges, such as high cyanide consumption, retardation of gold leaching and competition in carbon adsorption circuits. Silver is often present at significantly higher concentrations than gold in many gold-silver ores and competes with gold in carbon adsorption circuits, limiting the gold loading rate and capacity, resulting in gold solution losses and reduced gold recovery.Curtin University’s Gold Technology Group has evaluated fresh and partially fouled (barren and regenerated) activated carbons at various Ag:Au ratios and total metal concentrations to determine the adsorption kinetics and equilibrium loadings for gold and silver. Conventional Freundlich isotherms were found to be highly inaccurate for predicting equilibrium loadings in the presence of both gold and silver.An integrated model, which incorporates competitive adsorption kinetics with a modified competitive adsorption isotherm model has been developed and validated using plant and laboratory data. This paper describes the model performance and some of its salient features."

Jan 1, 2016

By Kevin M. Ansdell, Irvine R. Annesley, Christine L. Mckechnie

The U-Th-REE mineralization at Fraser Lakes Zone B is hosted by granitic pegmatites and leucogranites, which lie along the deformed contact between Paleoproterozoic metasedimentary gneiss of the Wollaston Group and Archean orthogneiss, approximately 25 km from the southeastern edge of the Athabasca Basin. The pegmatites/leucogranites are subcordant to concordant with the regional foliation and are concentrated within a northeast-plunging antiformal fold nose, the study area, which lies west of Fraser Lakes. The mineralized pegmatites/leucogranites in the western part of the study area (Group A) are typically enriched in U (± Th) with Th/U ~1, and contain uraninite, thorite, zircon, and allanite. Those intruding the central part of the study area (Group B) are generally enriched in Th and LREE, with Th/U >2, and contain monazite, thorite (commonly U-enriched), and zircon. The pegmatites and leucogranites in Group A tend to be slightly enriched in SiO2 and depleted in TiO2 relative to those in Group B and are interpreted to represent more evolved crustal melts. Both groups are peraluminous and show varied chemistry. Partial melting (~850ºC and 9 kbar) of a metasedimentary rock-dominated source, entrainment of accessory minerals as xenocrysts, and assimilation-fractional crystallization processes combined to enrich the granitic pegmatites/leucogranites in U, Th, and REE elements. Transfer of melt from the source region to the crystallization sites was assisted by deformation within and along major structural zones, such as the folded Archean-Paleoproterozoic discontinuity. The character of mineralization and structural control in the study area is reminiscent of the alaskite-hosted deposits at Rössing, Namibia.

Jan 1, 2013

By M. Elmadagli

Wear mechanisms of two commercial aluminum alloys, namely a spray formed and extruded Al-25%Si alloy, and a sand cast A390 alloy (18.5 %Si) that are known to be successful in cylinder bore technology were studied to have a better understanding of the requirements for wear resistant aluminum alloy design. From durability point of view these alloys are known to be successful for engine bore applications. It is interesting to compare the wear mechanisms in these alloys because they have significantly different silicon content and microstructures, and were produced using different techniques. The wear tests were done using a block-on-ring configuration, in controlled air atmospheres (5 % relative humidity). In spite of the differences in silicon content and microstructure, the wear mechanisms were similar and consisted of formation and destruction of hard tribolayers that are either formed by either mechanical or chemical interactions on contact surfaces. The differences in the wear rates between the two alloys arose from the differences in the hardness of the worn surfaces, and the alloy's ability to sustain the tribolayers on the worn surfaces.

Jan 1, 2004

By Harry J. Cain

Introduction The property of Pioneer Gold Mines of B. C., Limited, is located in the Lillooet mining district of British Columbia, on Cadwallader creek, 54 miles distant by motor road from Shalalth, a station on the Pacific Great Eastern railway. Milling by the present Company was commenced in 1924, a small amalgamation plant, consisting of a crusher, Bryan mill, and plates being operated until 1928. Tailing from this plant was impounded and later treated in the 100-ton continuous counter-current decantation cyanide plant which was erected during 1927-28 and placed in operation during May of 1928. A second cyanide plant, employing continuous counter-current decantation, having a nominal capacity of 200 tons, has been erected during the past few months and was put into operation during September of the present year. The ultimate capacity of the combined units of the present mill has not been determined, but it is expected to be much in excess of the rated capacity. The Ore The ore, as received at the mill, consists chiefly of quartz carrying free gold, with small amounts of pyrite, arsenopyrite, and pyrrhotite in evidence, though probably amounting to less than one per cent of the total. Some gold is very closely associated with the sulphides. The country rock is a basic igneous rock, probably an augite diorite. Near the vein it is highly altered to sericite, which slimes readily on grinding, and does not settle very well. The quartz is of two types, clear and ribbon. In the latter, the ribbons, which are not much thicker than paper, consist of shattered sulphides. In crushing this ribbon quartz, breakage is often along the streaks, exposing these shattered faces to advantage in subsequent treatment. While gold is the metal for which the ore is mined, some silver is also present and is paid for by the mint. It is, however, unimportant from a commercial viewpoint. From the standpoint of crushing and grinding, the ore might be termed 'medium 'hard'.

Jan 1, 1932

By J. Ipinza, J. P. Ibáñez, Casas J., S. Cortés

Copper powder generated during the treatment of electro-metallurgical bleeds by reactive electro- dialysis (RED) had totally reduced the content of ferric ions in acidic synthetic electrolytes (Cu (II)- Fe (III) – H2SO4). In batch and columnar experiments 100% of the ferric ions were reduced to ferrous ions with an extremely high kinetics. A preliminary conceptual design for reducing ferric ions based on an integrate RED- Column for treatment of electro-winning bleed system is discussed. This system is able to recover simultaneously sulfuric acid and copper powder, which will reduce ferric ions. INTRODUCTION It is well known the negative effect of ferric ions in the copper electro-winning process. The increase of ferric content in the electrolyte reduces the current efficiency, i.e., there is an increase in the energy consumption, and changes the surface morphology of the copper deposit (Das, Gopala & Krishna, 1996; Vargas & Parra, 2013). The increase of the specific energy consumption due to the loss of current efficiency occurs by the reduction reaction of ferric to ferrous ions in the cathode, at the anode the ferrous ions are slowly oxidized to ferric ions (Shaw, Dreisinger, Lancaster, Richmond & Tomlinson, 2004). To control the level of iron in the electrolyte, bleeds are needed; this bleed electrolyte containing copper, sulfuric acid, cobalt, iron and other impurities normally is waster, which increased the production cost of the plant (Milbourne, 2002; Mckevitt & Dreisinger, 2009). Then, permanent efforts oriented to treat those bleeds to avoid losses of valuables components are made; among them are use ion exchange resins (Shaw et al., 2004; Mackevitt et al., 2009), chemical precipitation (Izadi, Mohebbi, Amiri & Izadi, 2017) and electrodialysis (Cortés, Ipinza & Ibáñez, 2013). The last one allows to the simultaneous recovery of sulfuric acid and copper powder. If one of the valuables obtained by treating the bleed can be used to reduce ferric ion concentration in the electrolyte could be an important asset. This issue at laboratory scale is reported in this work, the use of copper powder, generated by reactive electro-dialysis when treating synthetic acidic electro-metallurgical bleeds, for reducing ferric ions in acidic electrolytes.

Jan 1, 2019

By J. G. Debanne

MOST company-employed petroleum engineers have in their accounting departments punch-card computers that can perform engineering calculations thirty to three hundred times faster than desk calculators, or they can rent such machines from Computing Service centres. These machines not only eliminate the drudgery of desk calculation but also the risks of human errors. The I.B.M. t 604 punch-card computer of Texaco's accounting department in Calgary has been used for oil and gas property evaluations, curve fitting by least squares, statistical core analysis studies, unsteady-state water in-flux studies, phase equilibrium performance prediction of oil reservoirs, gravity segregation calculations, etc.

Jan 1, 1958

By L. M. Nolan

Chemical Mechanical polishing, or CMP, has four components in the polishing interface; namely the polishing pad, the polishing fluid, the abrasives in the fluid, and the surface being polished. Understanding the way that load is transferred between these components is key to understanding and predicting wafer polishing. Numerous models of CMP and the different load sharing arrangements which occur between these four components have been proposed. These include models by Luo and Dornfield (1) and Fu, Chandra and colleagues (2). Other models focus on just one or two loading arrangements, such as `hydroplaning' when all load is transmitted by the liquid in the case of Runnels and Eyman (3). In this work, we consider four possible combinations of load transfer from pad to wafer in CMP. These combinations are listed below in Table 1 and are illustrated schematically in Figure 1. It is important to note the role of scale in this process; the illustrations in Figure 1 are drawn to scale from actual profilometer scans obtained over a length of 5 with particles of 150 nm in diameter. Table 1 - Load Transfer Combinations Load Regime Illustration Wafer - Fluid - Pad Figure la Wafer - Particles/Fluid - Pad Figure lb Wafer - Particles - Pad Figure lc Wafer-Pad Figure ld The interest in load-sharing between the system components is because some configurations are anticipated to achieve higher polishing rates than others. For instance, in hydroplaning, or hydrodynamic lubrication, the lateral force exerted on the polished surface by the particles can be no higher than the fluid shear force developed in the gap between the pad and wafer. This is not expected to generate high rates of material removal from the surface (4). For contact that is largely between the pad and the wafer, such as the regime depicted in Figure ld, the lateral load is transmitted to the wafer by the pad and is hence limited by the pad's low rigidity. This regime is not expected to generate high material removal rates either. The highest levels of material removal are expected from regimes where the mechanical load exerted on the system is transmitted by the particles, in combination with either the fluid or the pad. Under what circumstances does the polishing regime change from one to another? What must occur in order to initiate or terminate contact between the system components? This is an ongoing question in the field of tribology, and has traditionally been viewed in terms of the pressure and velocity applied to the system, the thickness of the fluid film between the two surfaces, and the roughness of those surfaces (4). In this paper, we propose a new mechanism ? that the load on the particles may be sufficient to totally embed them in the polishing pad, at which point they are no longer able to transmit load and polish the wafer surface. This is illustrated schematically in Figure 1(d).

Jan 1, 2010