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By W. G. Davenport

Chapters 7,8and 9 calculated three combinations of: blast composition (mass% O2, mass% N2) oil quantity per tonne of concentrate blast temperature that will steadily produce molten 65% Cu matte from pure chalcopyrite-concentrate. The combinations are:

Jan 1, 2001

By Anurag Tripathi, J. K. Saha, S. K. Ajmani, J. B. Singh

"The quality of steel is a major concern in the metallurgical industry. The control of liquid steel temperature can enhance the level of cleanliness in steel. Ladle is one of the major vessels used to transfer liquid steel between different stations. The heat transfer phenomenon taking place in this vessel needs to be monitored for controlling the liquid steel temperature. A CFD model was developed for prediction of liquid steel temperature during complete process cycle of ladles in direct heats. The model was validated with liquid steel temperature measured at on-line purging station and tundish during teeming from one of the actual steel plant. The accuracy of model was 96 %. The results obtained show insignificant effect of slag thickness, tapping temperature and ladle life on liquid steel temperature in the ladle. However, the importance of initial refractory temperature was noticed. The CFD model developed in present work can generate the thermal history of liquid steel and refractory walls of any ladle at any stage.1. IntroductionThe control of liquid steel temperature is desired to achieve required steel quality. The low casting temperature is detrimental and may result in nozzle blockages due to premature solidification in the tundish. The phenomenon of heat losses taking place in ladles needs to be understood for prediction of liquid steel temperature. The assessment of thermal profile of liquid steel from BOF converter to caster can be done through consideration of heat losses at all points. Hlinka and Miller [1] showed that the ladle pouring temperature varies due to heat losses from molten steel into surrounding refractory layers. The phenomenon of thermal stratification was numerically simulated by Ilegbusi and Szekeley [2]. The effects of slag cover on heat loss and liquid steel flow in ladle before and during teeming to a continuous casting tundish was numerically simulated by Chakraborty and Sahai [3]. Investigators also developed some simple models to predict the steel temperature for some of the processes taking place in ladles [4-9].The present work is an effort to generate the full information about the temperature drop taking place in any ladle throughout its process cycle. This information can be used to predict liquid steel temperature and to take decisions to minimize heat losses."

Jan 1, 2012

By Katsutoshi Komeya

Aluminum nitride(A1N) is a theoretically high thermal conductive ceramic, but is a poor sinterable one because of its covalent bond structure. The densification of A1N had to be done first. It was found in 1968 that rare earth compounds as yttria were an excellent sintering aids. Recently more improvement of conductivity was attained by following effects of yttria: (1) trapping of oxygen in A1N sources to form yttrium aluminates, (2)elimination of the aluminates by heating in carbo-reductive atmosphere. Consequently very high thermal conductivity of up to 270W/mK has been developed. Thus A1N applications for substrates and packages have been opened.

Jan 1, 1992

By Kai Tang, Casper van der Eijk

Natural gas has been used as reductant in the production of iron for several decades. Recently, the use of natural gas as reductant for other metals has been drawing attention because of the low price of natural gas, as well as the reduction of CO2 emissions compared to the use of coke and coal. In this work, the reduction of a mixture of Ti- and Ni-oxides by natural gas has been studied. Within the Ni-Ti system, the intermetallic compound Ni3Ti is thermodynamically the most stable one. Therefore, powders of Ni-oxide and Ti-oxides were mixed in an atomic ratio of three to one and subsequently pelletized. Reduction was performed in a TGA furnace at constant temperature with varying reducing gas atmospheres. In a natural gas containing atmosphere, the Ni-oxide was easily reduced to metallic nickel while the Ti was reduced to Ti-oxycarbides or Ti-oxynitride when nitrogen was present. Depending on the process parameters, several percent of Ti was dissolved in the nickel-based solid phase.

Jan 1, 2014

By Zhihe Dou, Yu Fang, Zimu Zhang, Yan Liu, Xiaoli Jiang Dianhua Zhang, Guanting Liu

"With the idea of “waste control by waste itself”, we come up with the crafts of using waste calcium carbide to mineralize CO2 in electrolytic aluminum waste gas, design and make out “Venturi gas-liquid-solid three stage reactor”, do experiments under the system of CO2-Ca(OH)2, investigate the influence on gas absorption by pH meter; investigate the influence on diameter distribution , rise velocity of bubble and local gas hold-up by dual conductivity probes; investigated the absorption of CO2 in every stage reactor under different initial proportion of CO2 by intelligent gas measurement system. The results showed that the reactor can fully absorb the CO2 in waste gas, and it has largely shorten the time of absorption and improve the CO2 utilization compared with the single stage reactor.The residual proportion of CO2 in the gas is below 0.08% through the absorption of three stage reactor,which show that absorption is extremely improved.IntroductionCarbide slag is a kind of polluting hydrolysis reaction byproducts in producing carbide in wet reactor, and it is mainly comprised by Ca(OH)2, It's estimated that there are about million tons carbide slag are piled up per year. Carbide slag is a kind of industrial wastes that hard to deal with ,which are treated by land filled in the past. It would not only occupy a lot of land, but also lead to secondary pollution [1].CO2 is the main greenhouse gas by now. In 2010, global CO2 emission has reached 33.5 billion tons, while China has now become the world's second largest emitter of CO2, emissions accounting for about one-seventh of the world [2].As the experts estimates, the greenhouse gas emission of whole nonferrous metal industry may over 0.6 billion tons per year, while CO2 emission of electrolytic aluminum is 0.334 billion tons per year [3]. So it is necessary and pressing to discover the reusing CO2 of electrolytic aluminum. With the idea of “waste control by waste itself”, we came up with the crafts of using carbide slag to mineralize the CO2 in electrolytic aluminum waste gas, which was experimented on the counterflow-three stage-venturi reactor,and studied the local gas holdup, residual concentration of CO2 and the volumetric transfer coefficient in the reactor."

Jan 1, 2014

By Peter Ryan

A patented process for agglomeration of Smelter ESP dusts is described. Addition of suitable binders followed by compaction, transforms fine, difficult to handle material into a dry, flowable agglomerate suitable for plant reentry. Details for the agglomeration process metallurgy and laboratory pilot plant testing are discussed. An example of full scale plant operations is described.

Jan 1, 1999

By Jingbo Liu, Zhimin Wang, Wenchao Li

"IntroductionThe advantages of non-stoichiometric perovskite material are highlighted in many papers[l]and many of this family of materials are well-suited to integration into microsensor devices. Among them, barium titanate is the most promising due to it's piezoelectric, pyroelectric, dielectric properties. Through modification, BaTiO3-based materials can be utilized in many kinds fields, such as surface wave probe; pholoconducting devices, field-effect transistor, permanent memory permanent storage, and ultrasonic transducerl2-3l. In this Paper, a series of BaTiO3-based polycrystals were synthesized by sol-gel processing which appears to be a very promising method for the manufacture of ceramic, because it offers significant advantages such as high purity, chemical homogeneity, controlled particle sizes of ceramics, and lower processing temperatures [4]. In a sol-gel process, alkoxides of the constituent elements show different reactivity toward water so that the preparation of multi-component homogenous system is difficult. In the experiment, inorganic salt was substituted for some of the alkoxides. Acetic acid which is employed for the solvent and catalyst, acts as donor ligand to titanium alkoxide and controls, the hydrolysis polycondensation reaction. Taking these aspects into consideration, we select the system Ba(OAc)2, , La(OAc)3, Ti(O11Bu)4 and acetic acid which is used as both solvent and homogeneous catalyst for the first time.ExperimentalA series of La3+-doped BaTiO3-based nano-crystals were prepared with sol-gel technology using various parameters. The precursor solution was prepared in the presence of barium acetate, lathanium acetate, and titanium tetrabutoxide monomer in butyl alcohol. According to the flow chart (fig. I.), Ba(OAc)2, La(OAch dissolved in the glacial acetic acid (0. lmol/40ml) in a three-neck flask were mixed with a solution of titanium tetrabutoxide monomer in butyl-alcohol(l 7ml/20ml) at room temperature and under constantly, vigorous stirring conditions. In most cases, the resultant solution was golden yellow and stable in the air. To this precursor solution, containing Ba, La, Ti in the desired ratio, water was added incrementally for hydrolysis under continuous stirring until sol was formed. After aging for more than 2 hours, sol was transformed to gel at room temperature. If heated during aging, the gel was formed in a shorter time. The wet gel was allowed to dry at 50°C for more than 10 hours. The dried gel was transparent or light yellow. In order to obtain BaTiO3-based nano-crystals, the amorphous dry gel was calcined at 600°C, 700°C, 800°C, 900°C, 1000°C respectively[5]. The ceramic humidity sensor was formed through the cold-pressed, aged, capsulated routes. The dried gels were crushed in an agate mortar and then pressed into discs of ? 1.5 X l.5mm (l.5mm diameter and l.5mm thickness), then held at about 16.5 MPa pressure for 3 min [6]. The disc was sintered at 1350°C and 1400°C for I hour respectively. During the processing, an Ag-Pt electrode was inserted in the sensor [7]. (See the flow chart.)"

Jan 1, 2000

The merging of flash smelting with spray converting in one single furnace is proposed as a continuous copper making process. The proposed process is expected to produce blister copper, clean slag and gas with high sulfur dioxide concentration. Some high grade matte is an intermediate product recycled within the proposed furnace, spray-atomized and converted. The thermodynamic equilibria of the simultaneous oxidations which take place during copper smelting and converting are discussed in order to establish the gradient of oxygen potential along the furnace required for smooth operation. The proposed process is a dynamic system designed to reach equilibrium only close to the slag skimming end of the furnace. The process feasibility is based on the predesigned significant difference between the rates of converting reactions in a finely dispersed system and the rates of deconverting reactions between immiscible liquid phases of restricted interface area. The converting of small stationary droplets of matte, in a silica saturated system, was studied in the laboratory for extremely short oxidation times (10 to 120 seconds). These experiments led to some interesting observations on reaction mechanisms and kinetic trends. The droplet size and the matte grade affected very strongly the oxidation rate and the proportion of the different products obtained.

Jan 1, 1976

By N. Menad

The formation of the dioxins can be dependent on the quantities of carbon, hydrogen, chlorine and oxygen present in a given system, as well as on parameters such as temperature and pressure. Inadequate supply of combustion air ( incomplete oxidation ), low combustion temperatures ( incomplete combustion ), and insufficient turbulence in the combustion are factors which can favour their formation. Dioxins were produced also calatytically from chlorinated phenol precursors, non-chlorinated compounds that were chemically, and reaction of phenol with inorganic chloride. In this paper different precursors such as combination of C, H, 0, Cl, rapid formation/combustion intermediates and routes to PCDFs are reviewed, and the influence of PVC amount on the formation of these isomers is discussed.

Jan 1, 2000

By Cheng Pan, Xuewei Lv, Guibao Qiu, Chenguang Bai, Meilong Hu

"Physic-chemical properties of slag at high temperature play an important role in the pyrometallurgical process of production of ferronickel alloy. It determines the operation efficiency, metal recovery ratio, energy consumption and the distribution of elements like S and P between the slag and metals. In the present work, the effect of MgO content in the slag on melting features and viscosity of the slag was investigated. The MgO content in the SiO2-CaO-MgO-Al2O3 -FeO in the quinary slag system varied from 14.5% to 22.5%. The results shown that all slag samples begin to softening at the same temperature, the softening temperature, melting temperature, flowing temperature decrease with the increase of MgO content when the MgO content is in range of 14.5 and 20.5 pct mass, and when MgO content up to 22.5 percent, the temperatures increase sharply. Besides the inflection point temperature of viscosity-temperature curve increase with the increase of MgO when the MgO content is in range 16 and 22.5 pct mass.IntroductionNickel is very important to modern society, without it, we would not be able to share many things in our daily life, such as airplanes, computers and many stainless steel appliances in our homes and workplaces1.. It is the essential element of the stainless steel making, and about 65% of the nickel consumed in the world is used to make stainless steel2., so with the increase of stainless steel, the nickel production and demand has continued to increase3.Nickel is produced from two distinct ore types: nickel sulfide deposits and oxide nickel laterite deposits. The great majority of world’s known nickel resources are contained in laterite deposits3.. The laterite ores are normal classified into two groups: the high-iron laterite ore and high-magnesia laterite ore1. Typical composition of high-magnesia laterite ore is in the range 1-3%, and these ores are suitable for pyrometallurgical process to produce ferronickel4."

Jan 1, 2012

By Richard J. Abitz

Thennodynamic geochemical models have been applied to assess the relative effectiveness of a variety of reagents added to aqueous waste streams for the removal of radioactive elements. Two aqueous waste streams were examined: effluent derived from the processing of uranium ore and irradiated uranium fuel rods. Simulations of the treatment train were performed to estimate the mass of reagents needed per kilogram of solution, identify pH regions corresponding to solubility minimums, and predict the identity and quantity of precipitated solids. Results generated by the simulations include figures that chart the chemical evolution of the waste stream as reagents are added and summary tables that list mass balances for all reagents and radioactive elements of concern. Model results were used to set initial reagent levels for the treatment trains, minimizing the number of bench-scale tests required to bring the treatment train up to full-scale operation. Additionally, presentation of modeling results at public meetings helps to establish good faith between the federal government, industry, concerned citizens, and media groups.

Jan 1, 1996

By A. Iván, Patiño C. Francisco, Flores B. Javier, Peréz L. Miguel, Hernandez A. Juan, Trapála P. Norma, Salinas R. Eleazar, Rivera L. Isauro, G. Flores, U. Mizraim

"Tills work is related with the production of tiles using wastes from mining and metallurgical industry of Hidalgo State, as raw material. These wastes present a majority particle size (60 %), minor than 53 m (mesh 270, in Tyler Series) with the following composition; 70.01 % wt. of Si02, 12.82 % wt. of Ah03, 3.80 % wt. of Fe, 0.70 % wt. of Mn, 3.98 % wt. ofK20, 3.34 % wt. of CaO, 2.50 % wt. ofNa20, 0.04 % wt. of Zn, 0.026 % wt. of Pb, 56 grams per ton of Ag and 0.6 grams per ton of Au. In this work, the partial results and experimental conditions for the preparation of some composites to produce tiles are shown. The composite that offers the best results in productions of tiles was that with 66.67 % wt. of mining waste, 26.67 % wt. of red mud and 6.67 % wt. of black mud.IntroductionTo now, mining activities carried out during more than 457 years in Hidalgo State, Mexico; has lead a great volume of wastes; which can be classified into different types, having among the more common; Acid mining water, solid transport water, elements in radical form, abandoned minerals without processing and processing minerals wastes known as burrows, being these the most abundant in the region counting with an approximated volume of 110 million of tons, presenting a fine particle size that can affect population health during windy epochs [1 -4].Form metallurgical point of view, is well known that a fundamental characterization study it is necessary to know the viability of reusing or recycling of these wastes. According this, these residues can also be considered as raw materials in other economical activities, due its Si, Fe, AI, Ca, Na and P oxides contents, its mineralogy and the distribution of chemical elements in the primary and secondary phases [1,2,5,6]."

Jan 1, 2012

By Takeo Fujino, Nobuaki Sato, Yarong Wang, Kohta Yamada

"Ternary mixed sulfides of some transition metals MTS3 (M=Ba, ·Pb, T=Ti, Zr) were synthesized by a relatively low temperature process using sulfur melt. The mixture of starting materials, such as, metals and/or binary sulfides and a large excess of sulfur was reacted in a vacuum-sealed Pyrex or quartz ampoule at 350- 600 °C for one to three weeks. After the reaction, the remaining sulfur was completely removed by a process composed of filtration of sulfur melt and followed dissolution in CS2• The binary sulfides impurities coexisted in the products were removed by rinsing the products in water and acetone. By using the above method, BaTiS3, PbTiS3 and BaZrS3 'Were obtained in pure form. The effect of addition of halides on the yields of these ternary sulfides were also discussed.IntroductionThere have been a vast number of studies on the preparation and physical and /or chemical properties of mixed metal oxides. As is well known, some of such compounds exhibit excellent materials properties, causing them for use in mechanical, electronic, magnetic and chemical devices. Not a few mixed metal sulfides show similar physico-chemical properties to those of the corresponding mixed metal oxides. However, the study of the mixed sulfide crystals is rather sparse mainly due to difficulties in preparing these compounds. In various methods which have been adopted for preparing mixed sulfides, the simplest method would be the solid-solid reaction of the component binary sulfides or elements. However, there are always diffusional constraints with regard to the reactions in solid phases causing it necessary to heat the reactants at sufficiently high temperatures, viz. 800-1200°C. On the other hand, some mixed sulfides are unstable at high temperatures or to change their materials properties due to sulfur nonstoichiometry and structural modification depending on temperature, i.e., synthesis of such compounds needs to be made at lower temperatures. Processing in alkali halide melts is hopeful to overcome the above problems but to obtain the halide melts the temperatures above ~ 600 °C is needed. Low temperature reaction has been carried out for the preparation of Hg1.24TiS4, which was formed by the ·combination of TiS2 and molten Hg metal at 320°C[l]. Reaction of WS2 with LiBH4 melt at 350°C yielded LixWS2[2]. These sophisticated methods, however, can be applied only to the vary special cases."

Jan 1, 2000

By Norihiko Fukatsu

In order to use effectively the previously reported new sensing system for hydrogen and oxygen potentials in molten copper, the criteria of the potentials for getting sound castings have been determined in the laboratory experiment. The copper melt equilibrated with a given hydrogen and an oxygen potential was rapidly quenched in the crucible. The relations between the holding potentials and the gas porosity in the solidified sample were investigated by measuring the density of the sample and microscopic observations. It was found that the defects of the gas porosity became the maximum at the potentials where the dissolved amount of hydrogen and oxygen was in the mole ratio 2: I. The samples having the density more than 99% of the theoretical value were obtained in the higher oxygen and lower hydrogen potential region or in the lower oxygen and higher hydrogen potential region. The criteria thus determined were examined by comparing with the measured potentials in the practical easting machine. In tough-pitch copper casting, the problem due to gas porosity was found to be serious when the hydrogen potential increased. In the oxygen-free copper casting, the evolution of hydrogen was found not avoided. The gas porosity in the casting, however, was found eliminated when the oxygen potential was kept at a low value.

Jan 1, 2003

By Bo Zhou

During secondary aluminum recovery, complex aluminum scraps are melted and refined often in a rotary melting furnace and the aluminum metal has to pass through a molten salt layer and melt down in a bottom aluminum bath. Previous experimental study and industrial observations have indicated that salt shell formation and re-melting on the metal solids in the early stage plays a critical role in the overall melting process of the scrap. In the present paper, mathematical models are developed to simulate the process of salt shell formation and its re melting, as well as aluminum melting in the molten melt. Influence of the salt layer properties, the residence time of the metal particles in the salt layer, the particle size, the temperature of bulk melt were investigated. Reasonable agreement with the measurement data was reached. The developed melting model will be used to construct a population balance model of the scrap melting behavior for a rotary melting furnace, taking into account the distributed characteristics of the scrap. Finally, an overall process model based on Computational Fluid Dynamics (CFD) for the rotary furnace will be constructed, coupling with the population balance model for the scrap melting.

Jan 1, 2003

By Takashi Miyamoto, Hideo Nakae, Hideki Yamaura, Takeshi Yanagihara

"For the production of partially composed metal matrix composites, namely discontinuous MMCs, using a casting· process, the interpenetrated phase composites with SiC particles were fabricated by pressureless iDfiltration using molten Al-Si alloys. This process is based on a wetting phenomenon, therefore, we discussed the technique based on the reactive wetting. The SiC particles coated by diluted water glass were sintered in a mullite Tammann tube and simultaneously infiltrated with molten Al-Si alloys in air at 1173~1573K. As for the improvement of the wettability between the SiC and the liquid aluminum alloy, Fe3O 4 powder was mixed with the water glass due to the thermit reaction between Fe3O4 and molten aluminum alloy. In some experiments, pure aluminum powder was placed on the sintered SiC to increase the interfacial area and the chemical reaction between the sintered Sic. and the melt. By combining these conditions, we succeeded in the complete infiltration without pressure at 1173K.IntroductionAs is well known, the mechanical properties of metal matrix composites (abbreviated MMCs) are superior than that of ordinary metals. However, their use has not been widely accepted because the production cost is very high due to their poor machinability. Therefore, the production of partially composed, namely discontinuous MMCs, by as the Lanxide process [l,2] has been investigated for many years. The Lanxide process, it takes a long time, sometimes up to 10h, in a nitrogen atmosphere for the infiltration. Therefore, the cost will be higher for common use. On the other hand, a high 'pressure process has been adopted for the production of discontinuous MMCs by the Toyota Motor Corp.[3]."

Jan 1, 2000

By Kikuo Okuyama, I. Wuled Lenggoro, Manabu Shimada

"Aerosol processing of materials such as (i) gas-to-particle conversion process (e.g., Chemical Vapor Deposition (CVD) method) and (ii) liquid (or droplet)-to-particle conversion process (e.g., spray pyrolysis) has become of major interest to produce novel submicron- or nanometer-sized particulate material used in electronic and chemical industries. After reviewing recent theoretical and experimental researches on the evaluation of properties and morphology of fine particles by the CVD and spray pyrolysis methods, the importance of the process engineering approach· for aerosol processing of materials and the use of advanced aerosol measurement technology have been pointed out.IntroductionMaterial synthesis via aerosol processing offers a route to producing nanometer-sized and submicrometer-sized particles of high purity with specifically tailored chemical and physical properties. Especially, single nanometer-sized particles (nanoparticle materials) are considered to play an important role in the synthesis of nanostructured materials as well as in nanotechnology in 21st century due to their quantum effect and so on.However, the transformation of gaseous or liquid precursors to the final functional particulate matters consists of various complex chemical and physical processes. In order to control the size distribution and morphology of produced particles, it is important to analyze and model various phenomena, such as gas-phase or liquid-phase chemical reaction, nucleation, condensation, agglomeration and sintering that occur simultaneously in aerosol material processing. By introducing the Aerosol Science and Materials Science, the authors have been trying to model the changes in particle properties and morphology by gas-to-particle conversion and droplet-to-particle conversion processes. The authors have also been trying to obtain the experimental data on the particles properties as accurate as possible."

Jan 1, 2000

By R. Padilla

A thermogravimetric study has been conducted to follow the decomposition and volatilization of arsenic from enargite concentrate in nitrogen and slightly oxidizing atmospheres. Temperature has a large effect on the rate of volatilization of arsenic. Fractional volatilization of arsenic as high as 98% were obtained in less than 60 min at 650°C in nitrogen atmosphere, while in slightly oxidizing atmosphere the same volatilization could be achieved in 30 min. It was found that arsenic volatilizes as sulfide in nitrogen atmosphere and as 4xture of sulfide and oxide in atmospheres containing 1% oxygen. By using the pore blocking and the first order kinetic models, apparent activation energies of 213 and 200 kJ/mol for the temperature range of 780 - 900 K and 205 and 184 kJ/mol for the temperature range of 900 - 985 K were determined for enargite and copper concentrate, respectively.

Jan 1, 1997

By Zhanjun Wang, Yongqi Sun, Mei Zhang, Zuotai Zhang, Min Guo

The role of fluorine on the viscous and crystallization behavior of CaO-SiO2-MgO-Al2O3-FetO-P2O5-(CaF2) slags were explored using the rotating cylinder method, non-isothermal differential scanning calorimeter (DSC), X-ray diffraction (XRD) and scanning electron microscopy (SEM) techniques. It was found that the viscosity slightly decreased with increasing CaF2 content. It was also found that CaF2 addition can promote the primary phase transformed from MgFe2O4 spinel to Ca3(PO4)F, which was beneficial to the enrichment of phosphorus. Additionally, the structure of the slags explained by X-ray photoelectron spectroscopy (XPS) and magic angular spinning nuclear magnetic resonance (MAS-NMR) were further analyzed, which was well in accordance with the above analysis.

Jan 1, 2016

By Scott Samson, Weidong Wang, Shekhar Bhansali, Vandana Upadhyay

"We present an improved design for the two-arm polysilicon thermal actuator. The classic thermal actuator design produces a localized hot spot at approximately the center of the thin actuator arm. This phenomenon limits the actuator efficiency, lifetime, and reliability. Since the actuator deflection is based on thermal expansion of the material, advantage may be gained by making the temperature profile more uniform along the hot-arm length. In our design, the geometry of the thin arm is modified by forming a nonlinear structure near the approximate location of the original hot spot. Electromechanical simulations of this design show an increase in deflection, due to a flattening of the temperature profile along the hot arm. The solid model generation, finite element analysis and simulations are carried out using PEA software. Experimental devices are in the process of being fabricated by using a polysilicon rnicromachining process.1. IntroductionMost active MEMS devices employ some kind of actuating mechanism to increase functionality. Various actuating mechanisms like magnetic, electrostatic, thermal, magnetostatic and piezoelectric have been investigated and incorporated for actuating microstructures. The primary features required from many on-chip actuating mechanisms are large deflection (>10 µm), low actuation voltage, low power.consumption, reliability, fast response, ease of design and fabrication, and small size. Thermal actuation is an attractive mechanism for rnicromechanical devices requiring high actuation forces, large deflections, good linearity and low actuation voltage. Thermal actuators, also known as ""electrothermal actuators"", ""heatuators"" or ""U-shaped thermal actuators"", have been largely used in MEMS based devices to provide both in-plane and out-of-plane actuation [l] .Thermal actuators are also easily compatible with standard CMOS circuitry due to their low driving voltage. However, high power consumption remains a major drawback of the thermal actuation mechanism."

Jan 1, 2004