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By N. Arbiter

Evidence for the floatability of sulphide minerals without collector is analyzed and it is shown that results obtained with ores, in contrast to those with single minerals or mineral mixtures, depend on many additional variables, some identified and others not. Because of the prevailing low levels and costs of collectors for most sulphide ores, it is unlikely that collectorless flotation will have commercial applications, so that continued research on the subject may be justifiable on theoretical but not on practical grounds.

Jan 1, 1993

This paper examines the feasibility of combining network modeling and computational fluid dynamics for modeling of underground mine ventilation systems. Both simulation methods have specific advantages and disadvantages for analysis of mine systems. Network modeling is widely utilized by many operations and allows for assessment of current systems and simulation for planning purposes. Alternatively, CFD has been utilized only marginally by operations and is typically a research tool, requiring considerable computational power, complex models, and careful analysis and calibration of results. Network modeling allows for a holistic approach to the ventilation system, giving quantity, velocity and pressure in every branch, but CFD modeling can resolve the flow regime in 2-D or 3-D, which is idea when examination of an area on a more detailed basis is useful, such as dust and gas control. Integration of the two can allow for more flexible systems analysis. The feasibility of integration, along with application to limited underground mine data are examined.

Feb 23, 2014

By AIME AIME

ORGANIZATION of The Federated American Engineering Societies was effected at the organizing conference of national, local, state and regional engineering and allied technical organizations at the Cosmos Club, Washington, D. C., June 3 and 4. Thus is brought into being the greatest national engineering society in the world. The object of the organization is to further the interests of the public through the use of technical knowledge and engineering experience, and to consider and act upon matters common to engineering and allied technical professions. Prominent engineers from all parts of the country, representing more than 75 engineering societies, with an aggregate membership of more than 125,000, participated in the organization. The constitution as adopted by the conference, calls for the creation of s managing body to be known as the American Engineering Council, and its executive board. The belief was expressed that the entire organization would come to be spoken of as the American Engineering Council. The council is to coordinate the activities of state councils and of local affiliations whenever these activities are of national or general importance or may affect the general interests of engineers. Representation in the council is to be according to membership of the component societies.

Jan 1, 1920

This paper explains why the valuation of mining assets is often a very different exercise from the valuation of the shares in the mining company which owns those assets. The fundamental reason for this is that mining assets, and the shares of the company which owns those assets have different risks. In order to properly value mining securities it is essential to: ò ensure all the different risks and other factors which impact on the value of the mining assets and the value of the shares are taken into account; and determine the extent to which the different risks and other factors are addressed in the value of the mining assets and the value of the shares so as to avoid double counting or not counting at all. If the alternative, but far from consensus, view is accepted that the correct valuation methodology to apply to shares in mining companies should be based on option pricing theory then conventional valuation practice of both mining assets and shares in mining companies will need to be fundamentally reassessed.

Jan 1, 1994

By Charles A. Gargano

The current state of the mass transit industry in America will be examined. How and why this important urban activity shifted entirely, or almost entirely, from the private sector to the public sector. Who pays for transit? For day to day operating costs? For capital investment? The prospects for transit's future will be the next major issue addressed. In a word, they are rather good. Over the past decade there have been major new transit investments made in Atlanta, Baltimore, Washington, D.C. and Miami, as well as constant re-investment in such cities as New York, Boston, Philadelphia and Chicago. While the current administration has put a temporary halt on the initiation of any major new rail transit projects using Federal funds, there are several mechanisms localities have for using other resources for such projects. These will be explored.

Jan 1, 1983

By H. A. Wheeler

IT may surprise some of our members to learn, among the industries based on the mineral resources of the United States that of clay now ranks third, being exceeded in value of product only by pig-iron and coal. The present annual value of clay-products exceeds the value of the outputs of gold and silver, and also exceeds the combined values of copper, lead, zinc, aluminum, mercury, antimony and nickel. These facts are shown in Table I. which gives the statistics for the year 1902

Jan 1, 1905

By Koji Nakanishi, Masayoshi Karasawa, Yasuhiro Morimoto

"Shin-Yokohama station (tentative name), one of the station of the Sotetsu - Tokyu through line (ST line), is under construction by the OPEN – CUT method. The Underground Soil–Cement Steel Diaphragm Wall is implemented as an earth retaining wall. This earth retaining wall is utilized as a main body of a subway station. It is the first time to utilize this earth retaining wall as the main body. There are two difficult issues for this project. One is that this station is planned under busy major road and there are many underground utilities, for example, an electrical transmission line. Because of that, construction area is limited. The other is that this station is located in a thick soft clay layer. This layer has a high risk of consolidation settlement because of draining during main excavation. Thus, high water tightness is required for this earth retaining wall. This paper reports design and construction methods for the Underground Soil–Cement Steel Diaphragm wall introduced as a part of the body of the subway station.1. OUTLINE OF SHIN-YOKOHAMA STATION 1-1. Location and structure of Shin-Yokohama Station Shin-Yokohama station is an intermediate station on the ST line connected to the Tokaido-Shinkansen bullet train, the JR-Yokohama line and the Yokohama Municipal Subway. Access to Tokyo and the Tokaido- Shinkansen from the eastern part of Yokohama city will be improved by this project. In addition, the number of estimated passengers of this station is one hundred thousand people/day because a soccer stadium (Nissan Stadium: 72,000 people), a huge indoor arena and a hotel are located in this area. This station consists of 4 stories and 3 spans (Max width; 29m, Depth; 33m, Length; 325.5m). Completion image is shown in Figure 2. Generally, stations have 1 platform and 2 trucks. But this station has 2 platforms and 3 tracks because some of ST line trains return at this station and a train deadheads from Hazawa station to this station in an emergency. This station is planned as 4 stories underground station, and the platform is on the lowest story. The reason why this station is in such a deeper position is to prevent the alignment from interfering with the Yokohama Municipal Subway station and foundation piles for bridge piers existing along the alignment. Even under the constraint conditions, earth covering should be shallow as much as possible. As a result, the tunnel edge is very close to the foundation pile, and the gap is only about 2m (Figure 3). In addition, passengers will be able to change trains easily from the ST line to the Yokohama Municipal Subway or vice versa at this station."

Jan 1, 2016

By B. McHenry, A. E. Wraith, P. J. Mackey

The Wallaroo smelter on the Yorke Peninsula, South Australia commenced smelting operations in 1861 treating ores from the nearby Moonta and Kadina mines. The plant expanded and modernized on several occasions and was a leader in the successful introduction of new technology to improve operations. It operated continuously until 1923 when local mines became exhausted; in the closing stages of the 19th century it was the largest copper smelter in the world outside of those in Swansea, Wales. In 1892 a small electrolytic refinery was established at Wallaroo, the first in Australia, based on principles developed by Elkington at Pembrey, Wales in 1869. The Wallaroo refinery was specifically built to recover gold and silver from copper produced by smelting gold-containing feed materials shipped from Western Australia. This first venture into electrolytic refining was replaced in 1903 by a somewhat larger refinery which, although modest in size for its time, with a capacity of about 1000 tonnes of cathode copper per year, was very productive in precious metals. Anode copper was produced by an updated version of the reverberatory-based Welsh process until 1910 when barrel-type pneumatic converters were introduced based on American practice; subsequently, anodes were cast by tapping the precious-metals rich "bottoms" portion of converter copper as produced at about one-fifth into the copper blow. The present paper describes the Wallaroo refinery, its anode supply and products, supported by initial observations on a sample of a Wallaroo cathode held in the collection of the South Australia Museum, Adelaide SA, Australia. INTRODUCTION Australia ranked 6th in the world for copper mine production in 2018, with an output of 918,000 tonnes of mined copper, after Chile, Peru, Congo, China and the USA; about 40% of Australian mined copper was smelted in the country. Interestingly, the world ranking of Australia in mined copper has, with a few variations, remained about the same for more than 100 years – of interest, it was also the 6th largest country for copper production at 21,089 tonnes in 1899. At that time, all or most of the copper was smelted in the country (Mackey, 2016). Copper was first discovered in Australia in 1842 in South Australia not far from Adelaide; additional copper discoveries in the region soon followed. At first, copper ore was shipped to Swansea, Wales for smelting (Bampton, 2003). However, in addition to the long, 150 day one-way sea passage, it seems Welsh smelters preferred higher grade of ores – these aspects and likely a mood in the new colony to be independent of Swansea (Evans, 2014) evidently encouraged local smelting at the mine sites using small, Welsh-type reverberatory furnaces fired with hardwood as fuel and operated by Welsh and Cornish migrants. The first large copper smelter in Australia commenced in 1848 at Bremer, near Callington some 60 km east of Adelaide. With larger discoveries on Yorke Peninsula, the Wallaroo copper smelter at Wallaroo Bay on the west coast of the peninsula commenced operations in 1861 (Bell & McCarthy, 2008). Thus began one of the most successful, and in its day, one of the most advanced and innovative plants in Australia if not the world. In the late 1860s, it was considered one of the largest copper smelters in the world (Bell & McCarthy, 2008)

Jan 1, 2019

By R. J. Gary

Why would a company in its right management mind risk a fuel conversion program on a fuel that can't burn if it's too wet or too dry, too hot or too cold, too coarse or too fine, or doesn't have enough Btu's to supplement good combustion? On December 23, 1981, two months ago, we finished our first ten years of burning lignite -- this unconventional coal. It is from that experience that I am qualified to address you today. As some of you here probably already know, my company, Texas Utilities Generating Company, has pioneered the utilization of Texas lignite for electric power generation on a large scale, and I think it is fair to say that we have done this pioneering work largely on our own. Some of us feel like Noah did when he built the arc! I have titled this presentation "The First Lignite Decision" because our company was the first to make this major decision in Texas in the mid-1960's. It was a big decision, and at the time, perhaps a bold one. When you look at the conditions that existed in the mid-1960's, you can see why.

Jan 1, 1982

By R. D. Brown

The first step in achieving a rationalization of Canada's crazy patch-work quilt of mining taxes and policies was achieved with the release last November of a major federal-provincial report on the taxation of the Canadian mining industry. The Report, prepared by a group of federal and provincial civil servants, sets out a concise and informative discussion of the major taxation and incentive issues facing the mining industry, and puts forward major recommendations for more rational and moderate taxation policies. It will be considered by federal and provincial Finance and Resource Ministers for possible action by the respective governments. The Report was prepared in response to a directive from the federal and provincial First Ministers in February 1978 to review the federal and provincial taxation of the resource areas. Although the Report is more successful in identifying problems rather than concrete solutions, and reflects some continuing differences of opinion between the governments involved, it does represent an important first step in a comprehensive review of our resource tax policies. This article summarizes the Report, which is some sixty pages in length. Although a detailed discussion of it is beyond the scope of this article, the report itself is recommended reading for those concerned about the current state of the Canadian mining industry.

Jan 1, 1979

By Long Han, Beijing General Research Institute of Mining and Metallurgy, Yu Xie, Yunhai Zhang, Yangge Zhu, University of Science and Technology Beijing, Yanbo Shang, Xingrong Zhang

"The first-principles method was employed to study the adsorption of hydroxyl calcium (CaOH+) and hydroxyl (OH-) on hematite and quartz surfaces. The calculation results suggested that OH- preferred to interact with the active Fe sites on the hematite surface, whereas OH- adsorbed on the quartz surface by weak hydrogen bond. Though CaOH+ could easily adsorb on the hematite and quartz surfaces by the formation of Ca-O bond, the covalence formed on the quartz surface was apparently stronger than that on the hematite surface, meaning a stronger and more stable adsorption. CaOH+ adsorbed on quartz surface was mainly through the interaction of O-2p and Ca-3d states, and this interaction on hematite surface was weaker.INTRODUCTIONIron Increase and Silicon Reduction Technology (Yu & Duan, 2002) of hematite is mainly through the reverse flotation (silica is floated away from the iron concentrate). There are two ways to achieve this (Houot, 1983). One is to collect quartz by cationic collector directly; the other is to activate quartz by lime and then collect it by anionic collector. There are two main different views with respect to the mechanism of quartz activation: mono-hydroxyl compound theory (Fuerstenau, Rice & Somasundaran, 1965; Fuerstenau & Palmer, 1976) and surface hydroxyl precipitation theory (Hu & Wang, 1988; Wang & Hu, 1990). The former indicated the formation of the mono-hydroxyl complex is one of the two criteria of quartz flotation. The later theory, on the other hand, suggested that surface precipitation is the adsorption of active species of metallic ion on quartz surface. However, most of those researches are based on the solution chemistry of flotation and little is done at the microscopic level.In this paper, by the help of first-principles calculations, the adsorption models, bonding conditions, Mulliken charge populations and adsorption energies of hydroxyl and calcium hydroxyl ions (OH- and CaOH+) on hematite (001) and quartz (100) surfaces were investigated to find out the lime activation of quartz at atomic level, which is significant for the researches of quartz activation theoretically and practically."

Jan 1, 2016

By RICKARD HANSEN

With vehicles frequently found in underground mines and tyres being a major fuel item, the risk of tyre fires will be severe underground. This study presents an in-depth analysis of tyre fires on mining vehicles to increase the knowledge of the risk, applying data from full-scale fire experiments and CFD simulations. It was found that the wheelhouse of the loader caused an increase in the flame tilt angle of approximately 10%, decreasing the flame impingement and heat flux downstream. The flame temperature of the drilling rig tyre was found to be approximately 7% higher than the loader tyre, increasing the risk of igniting adjacent fuel items. The construction of the wheelhouse/mudguard will contribute to a longer flame length by creating a fuel-rich environment. The CFD simulations predicted higher flame tilt angles for the drilling rig case for higher flow velocities, indicating the influence of a varying wheelhouse/mudguard construction and tyre geometry on the flame tilt angle. The construction of the loader resulted in a flow behaviour, where the short distance to the front mudguard/tyre and the separation of flow directly downstream of the protruding construction led to fire gases being steered past the front mudguard/tyre. In the drilling rig case, the longer distance to the front mudguard/tyre led to fire gases being directed towards the body of the vehicle after passing the area with flow separation. An increased knowledge of the tyre fire risk on mining vehicles and mitigating measures would improve the fire safety in underground mines.

Feb 10, 2022

By P. L. Schwartz

The present method of shipping potash to the myriad of consumers is inefficient, not only because of the extreme and unpredictable nature of seasonal demand, but also because railway car turnaround times are very lengthy. The Floating Train system employs unit trains of potash operating from Saskatchewan mines to distribution warehouses located throughout the six corn-belt states of Minnesota, Iowa, Wisconsin , Illinois, Indiana and Ohio, transshipment points at Thunder Bay and the U.S. waterway network, and, where applicable , large consumers. These unit trains would "float", meaning that they would not originate at the same mine nor terminate at the same warehouse on each trip . They would " float " freely among the origins, destinations and participating railways. The potash would be shipped uniformly throughout the year and usually stored in warehouses located within the six states. It would be subsequently delivered to consumers within a 75-mile radius. Distribution warehouses and rolling stock would be provided by a new company, Potash Distribution Limited, consisting of major potash producers and the Canadian railways. Potash Distribution Limited would be responsible for the distribution of potash from the origin through the warehouses to the final consumer. The additional costs of providing warehouse space and outbound delivery will be offset by the reduction in both rail rates and "peaking" expenses.

Jan 1, 1978

By R. R. M. Cousens, W. S. Garrett

Discussion: L. T. Campbell Pitt: When Mr Garrett and I discussed the design and construction of plugs and bulk head doors to resist great water pressures in mines about ten years ago, we visualized an emeregeny when there would be no time for site preparation. We could not however, anticipate a problem of such magnitude and urgency as the one described in the paper under discussion. The paper very clearly describes the flooding and the measures taken to save the mine. The complete flooding would have been a national disaster. The account of the combat between man and water reads like the account of a military operation. It was an endeavour which achieved success because there was a master plan, tenacity and, in fact, heroism. The paper is of necessity a long one. In my contribution I will mention some historical facts and factors that I believe have relevance to the flooding and the saving of the mine. It is of great satisfaction to me to have been one of the two initiators of a new approach to underground plug design and construction. The investigation was taken over by a Chamber of Mines Committee which combined our early work with further research and the resulting data had a significant bearing on the West Drie emergency plug designs. The final plug length was correctly based on the requirements to obviate leakage. A plug to have structural strength only would have been very much shorter but so ineffective as to have become a waste of labour, material, and in consequence, wasted the limited time available to prevent flooding of the whole mine. The figure of 75 lb per sq in. sheer stress provided a very ample margin, in my opinion, but under the very difficult site conditions and the limitations of plug material suitable for the very unusual construction, justified such a figure. There must have been considerable temptation to reduce the safety margin due to the urgency to complete and commission the plugs, but it is much to the credit of the directors of this operation that nothing less than a safe design was permitted. In about 1945 Blyvooruitzicht Gold Mining Company, which was then mining in to the West Driefontein area to assist in early development, decided to protect themselves from a possible inrush of water from the latter mine. A bulk head door was accordingly designed and installed on 2 level between 1945 and 1948 at 4,218 ft below surface. Since West Driefontein paid for it, Gold Fields consulting mechanical engineers collaborated with their colleagues of Rand Mines who completed their design after a few modifications were agreed. This door was never used to prevent an inrush into Blyvooruitzicht but the exercise was very useful to Gold Fields when the high pressure doors initially installed on 10 and 12 levels between Nos. 2 and 3 shafts to enable isolation of one section of the mine from another were designed. At that time the capacity of West Driefontein to cope with an inrush of water was comparatively small because the storage in stoped areas and the installed pump capacity were much less than in later years. These doors together with others of the same design were later moved to the lower levels served by sub vertical shafts. In addition, doors to prevent flood water entering the pump chambers on 18 level were installed at each end of that level, and designed for a head of 360 feet so that water would have to reach 16 level before the pumps were flooded. All these doors were called upon to hold water and it is reported that only a small plug in one of the doors and a 4 in. dia flanged pipe joint failed. The lesson is that in these cases the smallest details warrant as much attention as the major ones. That these were the only equipment failures when so much depended on equipment, is very much to the credit of design engineers, both of the Gold Fields head office and companies who supplied both mechanical and electrical equipment. Until I had read the paper I wondered why the policy of isolation by bulk head doors was not continued as the development moved eastward towards the Bank Compartment and particularly when it pierced the Bank dyke. The reasons have been given in the paper. It was unreasonable to expect provisions to be made to counter the remote contingency that the large installed pumping capacity and mine capacity to store water would be exceeded during a peak inrush. When pumps were being considered for West Driefontein, it was decided that the Gold Fields standard underground main pumps at that time of 1 million gallons per 24 hours would be too small. Three alternatives were considered. 1. Very large units that would require underground sub assembly and dismantling of both pump and motor. 2. The largest pump and motor that could be conveyed as a complete pump or motor from surface to the pump chamber. 3. Pumps of higher speed to reduce dimensions and weight. It was decided to adopt alternate 2 because of avoidance of transporting pumps in parts and assembling underground. Alternative 3 was not favoured because high speeds would have introduced problems of more exact rotor balancing. I believe the decision was correct and in the crisis enabled comparative easy transport of pumps and motors to surface for overhaul and, if required, transfer to other pump stations. The standard pump thus became a 10 stage 1,500 rpm pump with a capacity of approximately 2 million gallons per 24 hours against a static head that varied

Jan 3, 1969

By M. Hancer, J. D. Miller

It is known from soluble salt flotation practice that the K, Mg double salts of kainite (KClMgSO43H2O), and carnallite (KClMgCl26H2O) are difficult to float and must be converted to other salts such as schoenite (K2SO4MgSO46H2O) and sylvite (KCl) in order to recover potash values. The flotation characteristics of these double salts have now been confirmed in some detail by carefully controlled laboratory experiments with both cationic and anionic collectors. The experimental results are discussed in view of recent experimental findings regarding the flotation characteristics of simple salts, in which the flotation response was shown to be determined by the interfacial water structure and whether the salt could be considered to be a water structure maker or a water structure breaker. The same approach can be use to explain the flotation response of the potassium double salts ; schoenite, kainite, and carnallite. In addition, the sign of the surface charge of schoenite (K2SO4MgSO46H2O), was determined as a function of pH from nonequilibrium electrophoretic mobility measurements. Schoenite appears to exhibit three charge reversals (CR) which can be explained based on surface hydrolysis reactions. The flotation behavior of schoenite is further considered based on solution chemistry calculations, electrophoretic mobility measurements, and microflotation results.

Jan 1, 2001

By C. W. Schultz

Earlier publications from The University of Alabama have indicated that column flotation performance is improved when operating at low pulp levels and when the feed is directed into the froth phase. To validate these early observations a series of tests were performed in which the position of the feed entry to the column and the pulp-froth interface were systematically varied. The optimum grade-recovery relationship was achieved with high feed entry (WA) of column height) and very low pulp levels (<10% of column height). The position of the pulp-froth interface appears to be the more critical variable. When operating in this mode (1. e. at low pulp levels) column flotation becomes. in reality. a froth separation process.

Jan 1, 1991

By Steve Tadolini

Underground roof falls can have devastating effects on the safety of operations personnel, and equipment, and seriously impact production. Immediate steps are usually taken to danger off and secure the area while clean-up efforts are designed and implemented. A critical step, often overlooked due to production demand, is the determination of - why the roof fall occurred so that additional occurrences can be avoided in future developments or what measures can be taken to identify areas that have similar ?symptoms?? Forensic engineering includes the investigation of materials, products, structures or components that fail or do not operate/function as intended. The authors define forensics in ground control engineering as the study of evidence discovered while examining underground roof falls by applying expert observational techniques and established mining engineering principles to determine the probable cause, hypothesize solutions, and design engineering safeguards to prevent reoccurrences. Simply stated, the primary steps in the forensics of underground roof fall techniques are: ?Assess regional and local conditions prior to the event. ? Assess post-event conditions. ? Hypothesize plausible ways in which the pre-event conditions became the post-event conditions. ?Search for evidence that either denies or supports the various hypotheses. ?Apply engineering skill to relate the various facts and evidence into a cohesive scenario of how the event may have occurred. This paper details the proposed technique by utilizing a roof fall case study that required the examination of five primary factors: mine design parameters, excavation geology, method of excavation, method of support, and mining cycle times.

Jan 1, 2009

By Steve Tadolini

Underground roof falls can have devastating effects on the safety of operations personnel, and equipment, and seriously impact production. Immediate steps are usually taken to danger off and secure the area while clean-up efforts are designed and implemented. A critical step, often overlooked due to production demand, is the determination of - why the roof fall occurred so that additional occurrences can be avoided in future developments or what measures can be taken to identify areas that have similar ?symptoms?? Forensic engineering includes the investigation of materials, products, structures or components that fail or do not operate/function as intended. The authors define forensics in ground control engineering as the study of evidence discovered while examining underground roof falls by applying expert observational techniques and established mining engineering principles to determine the probable cause, hypothesize solutions, and design engineering safeguards to prevent reoccurrences. Simply stated, the primary steps in the forensics of underground roof fall techniques are: ? Assess regional and local conditions prior to the event. ? Assess post-event conditions. ? Hypothesize plausible ways in which the pre-event conditions ? became the post-event conditions.Search for evidence that either denies or supports the various ? hypotheses.Apply engineering skill to relate the various facts and evidence into a cohesive scenario of how the event may have occurred. This paper details the proposed technique by utilizing a roof fall case study that required the examination of five primary factors: mine design parameters, excavation geology, method of excavation, method of support, and mining cycle times.

Jan 1, 2009

By Linli Wu

During the measurement of contact angle, a misty band was observed near the substrate. Hsien-Nan Ho and Shinn-Tyan Wu thought this was because the oxygen atoms on the interface migrate to the droplet surface to form an oxide band near the substrate. But from our experiments misty band appeared before the drop reach to the substrate. Theoretically speaking, the oxygen partial was the same everywhere in the vacuum furnace. So there was no condition to provide enough oxygen forming oxide. This appearance would be explained more reasonably with the optics principle. Most reflected light would be absorbed by the substrate and the light cannot reach the observation area, so the misty band formed.

Jan 1, 2006

By F. Ajersch, P: Tsantrizos, K: Shanker

"TiN films have been deposited on various substrates by a novel reactive plasma technology. In this process, a nitrogen source (NH3 or N2) and TiCl4 are reacted in the jet of a plasma torch, and are deposited onto a substrate forming TiN films at a high growth rate ( > 2µm/min). It was found that the process parameters strongly affect the microstructure, thickness, density, and growth rate of the TiN films. These parameters include source of nitrogen (NH3 or N2, N/Ti ratio, temperature of substrate, and spray distance. In general, it was found that thick and dense coatings were deposited when the N:Ti ratio was kept low, and the substrate temperature was high. Also, for the series of conditions investigated, NH3 was found to give much better results than N2•. The limitations and advantages of this technique are also discussed in this paper.IntroductionTiN is an extremely hard material and is used in many wear applications, particularly as a protective coating on cutting tools to extend their Iife(1.2). Owing to its excellent chemical stability, TiN is also frequently used as a diffusion barrier in the electronics industry for sub-micron Al/TiN/Si ohmic contact systems (3) or as a coating on high-temperature resistant alloys in gas turbine applications (4), based on its good resistance to oxidation. Other applications include decorative coatings in the jewelry industry, and specialized applications such as solar energy absorbers and transparent heat mirrors(5).TiN films can be deposited/formed using various techniques. The main techniques of deposition are CVD (Chemical Vapour Deposition) and PVD (Physical Vapour Deposition). Each of these techniques can have many variations in equipment characteristics, reactants as well as a range of process parameters (pressure and temperature). In the CVD process, TiN is generally deposited onto a heated substrate where a chemical reaction takes place. The reaction can be one of reduction(6) (e.g.: TiCI4 + 0.5N2 + 2H2 --> TiN + 4HCI), of thermal decomposition(7) (e.g. decomposition of titanium dialkylamide), or of displacement (e.g. TiCI4 + NH3 --> TiN + 3HCI + 0.5CI2)' The displacement and reduction reactions are the most common."

Jan 1, 1994