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By R Handfield, G Kary, Frieda Project

Recent exploration by the Cyprus Amax-Highlands Pacific-OMRD Joint Venture at the Frieda River project, PNG has demonstrated the extent of igneous phases, alteration and mineralisation, and the relationships between the various mineralisation styles in this major Cu-Au porphyry-epithermal system. The project area is in the obducted volcano-sedimentary section of the New Guinea mobile belt 78 km NE of Ok Tedi. It is between two major NNE dipping faults interpreted to have undergone thrusting then sinistral shear in the Late Miocene to Recent. The Frieda River Igneous Complex is a 15 km +7 km ovoid area with a central pod of basaltic andesite volcanics with cogenetic diorite to quartz diorite subvolcanic intrusions, and flanking clastic sediments. A series of late-stage, hornblende quartz diorite plugs ring the main igneous mass. The igneous rocks have a normal K calc-alkaline character with a very limited compositional variation. The intrusives are exposed on the eastern flank of the complex and have five mappable units and numerous defined phases. The southeastern quarter of the complex is host to a cluster of at least seven stockwork porphyry copper and skarn-hosted deposits within an area of 4.5 +3.5 km. The Horse-Ivaal and Koki deposits have identified resources totalling 804 mt @ 0.46 per cent Cu and 0.3 ppm Au, and the other deposits are in various stages of exploration. All these deposits are related to the Horse Microdiorite phase of the Complex and are outlined by a zone of potassic-propylitic-SCC alteration. Local overprinting argillic and advanced argillic alteration is related to a separate, post-porphyry mineralisation intrusive phase. The recent emphasis has been on the identification of higher-grade zones using ideas of structural control and specific intrusive-alteration-mineralisation relationships within the known resource areas. An elongate area 13 km x 4 km in the centre of the Complex has advanced argillic alteration in the volcanic rocks. This alteration zone hosts the Nena deposit (52.8 mt @ two per cent Cu and 0.7 ppm Au) and approximately 20 prospects of high sulphidation type. These deposits are distributed along two prominent NW-trending siliceous ridges interpreted as regional scale structures. Nena is a pod of vein and replacement sulphides hosted in a tectonically controlled multiphase breccia that overprints the advanced argillic alteration. The Nena deposit is 4 km from the nearest of the major porphyry occurrences. It is underlain by basemetal veins and minor porphyry mineralisation that are related to the Flimtem Trachyandesite intrusive phase. The recent search for additional Nena-type ore has focussed on the siliceous ridges using detailed structural and geochemical ore control criteria. Widespread, but poorly mineralised, basemetal-bearing carbonate and sulphate veins form a ring around the mineralised area. These veins have sericitic selvages, cut the porphyry mineralisation, but are cut by and locally underlie the silica-alunite phase of the advanced argillic alteration. The current model is that there are discrete intrusive phases responsible for each of major hydrothermal events at Frieda. These include from oldest to youngest:the Koki phase has no related alteration or mineralisation; the dominant Frieda phase has the hornfels, early skarn and minor magnetite-chalcopyrite mineralisation; the Horse phase has the bulk of porphyry copper and skarn-hosted mineralisation and minor basemetal veins; the peripheral Knob phase is barren; and the Flimtem phase has the high sulphidation epithermal deposits and minor porphyry and vein mineralisation. The intrusive phases span the interval 17 to 11.5 Ma and are co-magmatic. They represent discrete batches off the parent magma, rather than simple fractionation products.

Jan 1, 1999

By Phillip R. Moyle

In 1985 the U.S. Bureau of Mines evaluated the mineral resources of the Sheep Creek West Wilderness Study Area (ID-111-36A), Owyhee County, ID, for the U.S. Bureau of Land Management. The Wilderness Study Area consists of 11,680 acres centered approximately 20 miles south of Grasmere, 10. It contains no mines, claims, or prospects. No mineral resources were identified; however, a geode occurrence within and adjacent to the Wilderness Study Area, and minor amounts of placer gold along Sheep Creek, may be of interest to rorkhounds and recreational gold panners.

Jan 1, 1986

By Joseph Nawrocki, Margaret Hettinger, Dr. Catherine Johnson

"Optimized rock fragmentation is essential for minimizing downstream costs to mining operations.Photographic fragmentation analysis, vibration monitoring, and high-speed video all providemeasurements of blast effectiveness and supply data that allows operations to modify blasts to achieve downstream goals."

Jan 1, 2016

Accurately modeling and predicting long term mill throughput is one of the challenges facing metallurgists, geologists and mine engineers in their quest to consistently deliver accurate life of mine business plans. Batu Hijau has systematically improved long and short term mill throughput predictions since feasibility and commissioning in 1999. This has been achieved through a combination of ongoing improvement to the geology ore hardness and grade characterisation model, drill and blast optimisation and, by application of these data to model mill throughput. Batu Hijau has demonstrated the ability to consistently estimate long term mill throughput within ±2% accuracy. Aside from reliably predicting expected production rates with the existing plant configuration, this predictive ability provides a solid foundation for identifying operating and design criteria for short term grinding circuit optimisation and future expansions. This paper discusses ongoing throughput prediction model development at Batu Hijau based on geo-metallurgical characterisation. Also discussed are tools used for day to day production performance management. This includes on line "Mine to Mill" variable monitoring to improve operations parameter ecision making and performance assessment.

Nov 1, 2011

By F. Wirfiyata

"Accurately modeling and predicting long term mill throughput is one of the challenges facing metallurgists, geologists and mine engineers in their quest to consistently deliver accurate life of mine business plans.Batu Hijau has systematically improved long and short term mill throughput predictions since feasibility and commissioning in 1999. This has been achieved through a combination of ongoing improvement to the geology ore hardness and grade characterisation model, drill and blast optimisation and, by application of these data to model mill throughput.Batu Hijau has demonstrated the ability to consistently estimate long term mill throughput within ±2% accuracy. Aside from reliably predicting expected production rates with the existing plant configuration, this predictive ability provides a solid foundation for identifying operating and design criteria for short term grinding circuit optimisation and future expansions.This paper discusses ongoing throughput prediction model development at Batu Hijau based on geo-metallurgical characterisation. Also discussed are tools used for day to day production performance management. This includes on line ""Mine to Mill"" variable monitoring to improve operations parameter decision making and performance assessment."

Jan 1, 2012

By Stephen Semeniuk

Discussion by Stephen Semeniuk Discussion As a valuator and SME member, I view Ross D. Lawrence's position as based on unproven and faulty assumptions made with regard to the pragmatic evidence presented in his paper. Moreover, his call for the inclusion of all mineral resources in discounted cash flow valuations is redundant, if not irrelevant, as there are procedures that already take all classes of mineralization into consideration for valuation purposes. In my experience as a valuator, I find that Canadian securities regulators are more than accommodating in allowing any valuations of mineral properties to be based on cash flow calculations. In other business areas, the same regulators usually reject discounted cash flow valuations of projects or businesses with no operating history. Instead, the regulators prefer valuations to be based on other transactions tested in the marketplace. Valuations based on actual market transactions are less subjective than discounted cash flow calculations and/or the capitalization of arbitrary, untested or undemonstrated earnings projections. In the mining and minerals sector, such projections may be made by persons not qualified to make such projections. In support of this statement, I direct readers to the article "Valuation of mineral properties which do not contain exploitable reserves" by Lionel C. Kilburn, which appeared in the August 1990 issue of the CIM Bulletin. To quote from the article: "Value of a mineral property depends basically upon metal prices, recoverable grades, mining and metallurgical practices, commodity supply and demand, and political-economic conditions, all of which vary with time. Five fields of expertise influence the value of a mineral property: •geological engineering, •commodity markets, •financial markets, •stock markets and •mineral property markets. The skills of geologists and engineers properly apply to the first field of expertise. Knowledge and consideration of the other four fields is important, but such advice is more properly sought from marketing experts, economists and stockbrokers." Securities regulators have created no hardship for valuators by excluding unsubstantiated resources in discounted cash flow valuations. In the field of engineering, best design practices apply. A margin of safety is built into the design criteria for any new equipment or structure that will exceed normally expected load levels and stresses, even though such considerations imply higher front end costs. In accounting, the comparable operating principle is conservatism. It explains why, for balancesheet presentation purposes, inventory is stated at cost or market, whichever is the lowest value. Similarly, when the engineering or geoscience-based valuator plays in the field of finance, the rules of accounting and applied economics apply. Regulators in their skepticism of income-based valuations are in tune with similar views already expressed in mining literature. To quote H. Van Tingley, in Mining Magazine, July 1996: "... the DCF method has inherent dangers when applied to undeveloped resources. Firstly, it presents an often-undeserved aura of accuracy. A DCF value is no more accurate than the least accurate of the assumptions incorporated into the calculation - and assumptions

Jan 1, 2003

By B Vietnieks, N Widmer, L White, E Tata, J Natukunda, D C. Ilouga, J P. Tyler

The Republic of Uganda aims to exploit its’ significant, un-developed iron ore resources to supply the required raw material for developing its’ iron and steel industry across all the stages of the supply chain. Large prospects of iron ore exists in Uganda in the eastern (Tororo) regions and southwestern (Kisoro-Kabale) regions of the country. The Kisoro-Kabale iron ore projects covers mineralisation in hematitic banded iron formation (itabirite) in the north-eastern Congo-Tanzania Craton; covering ten Iron ore prospects. The prospects include Kamena, Karukara, Nyamiringa, Kyanyamuzinda, Rugando, Katagata, Rwengongo, Kijuguta, Kihumuro and Katuna. High-grade hematite ore prospects in south-western Uganda have known grades ranging from 55 per cent to 68 per cent iron ore content with an exploration target estimated at over 500 million tonne (Mt). Small scale production of iron ore from the south-western regions provide raw material to existing steelmaking and direct reduction iron ore plants located in the Jinja and Iganga districts of eastern Uganda. Large quantities of iron ore and other steelmaking raw material, however, are required to be imported into Uganda due to the limited exploration and development of their own iron ore mining operations. A joint collaboration between the European Union (EU), the Department of the Geological Survey and Mines (DGSM), Ugandan Ministry of Mines in partnership with Australian drilling and mining consultancies, ADT Africa and Kalem Group as a EU funded project was undertaken during November 2022 and September 2023. Exploration and evaluation of the ten iron ore prospects in south-western Uganda was undertaken through geological mapping, drilling, assaying, and technical studies with the view to attract investment for the development of Uganda iron ore mining and steelmaking industry. The collaboration developed mineral exploration policy, guidelines and standards, an iron ore exploration manual, a geological data management policy, and to support the sustainable development of iron ore mining in Uganda through building the capacity of local Ugandan geology and mining personnel through the transfer of knowledge and expertise from experienced iron ore experts. The quantification of these resources is an important first step in assessing their economic potential and attracting mining investors. This paper presents an overview of the investigation program and the preliminary results as an important first step in attracting mining investors to this exciting new iron ore province.

Sep 18, 2023

By H. E. Harris

An extensive experimental program was carried out to determine the variability of respirable dust samplers and to determine whether area dust sampling is feasible in coal mines. For sampler variability, it was found under laboratory conditions, that a single dust measurement could be as much as 0.30 mg/M3 from the true value at the 95% confidence level. Under actual underground mining operations, this difference could be as much as 0.52 mg/M3 in the 0 -5.0 mg/M3 range. The results from dust sampling on 175 production shifts involving over 2,500 on-man and area dust samples showed that area sampling is viable, but the field investigation did not establish necessarily where the best area locations were.

Jan 1, 1976

By Bruno Mattle, Max John

For tunnels with low overburden, the shotcrete lining is the main element of ground support, which is why shotcrete behavior is of prime importance. Following its application, shotcrete not only gains strength and stiffness with time but—if loaded at an early stage—it is also subject to creep which in turn leads to stress relaxation. For two-dimensional FE calculations, a computational modulus of elasticity of shotcrete is to be used. Based on parameter studies it was found that the modulus of elasticity of shotcrete depends on both shotcrete mix and ground behavior. While the Young’s Modulus used for young shotcrete may range from 1,000 to 7,000 MPa, the Young’s Modulus used for hardened shotcrete is best represented by a value of 15,000 MPa.

Jan 1, 2003

By R. W. Jigins

OPERATIONS of the Braden Copper Co. are in the Chilean Andes, southeast of Santiago. Most remote of the company communities is Sewell, a town of 12,000 people, 7000 ft above sea level at the junction of the Coya and Teniente rivers. Four miles down the Coya River is the smelter town of Caletones, elevation 4500 ft, with a population of about 3000. At the junction of the Coya and Cacha-poal rivers 24 miles below Sewell is Coya, elevation 2500 ft, location of the company's two hydroelectric plants. The principal accounting offices; steel, iron, and brass foundries; railroad shops; and major mechanical repair and fabricating shops are at Rancagua in the central Chilean valley, 44 miles from Sewell. The company owned narrow-gage railroad connects with the Chilean national railroad at Rancagua and above Coya is the only modern means of travel. El Teniente mine at Sewell is the largest underground copper mine in the world. The mill, at the portal of the main tunnel, has a capacity of 34,000 tons of crude ore daily, although production is lower during the winter beacause of electric power restrictions. When operating at capacity the mill produces 2000 tpd of copper concentrates and 32,000 tpd of tailings. Tonnage of tailings is equivalent to about 100,000 tons of pulp at normal water to solid ratio. Because the streams flowing from the Andes in the area of Braden's operations are used for irrigation, it is impossible to dump tailings directly to the river. The tailings pulp must be separated into solids and decanted clear water, and the clear water returned to the same water shed from which the original water was removed. Remaining sands and slime must be deposited in a reservoir where they will not cause trouble to farmers.

Jan 1, 1958

By Hinkley JT, Smitham JB, Nicol SK

Historical investigations of mineral flotation have highlighted the many factors which affect flotation. Some of these are related to the mineral, its degree of liberation (however defined), solution chemistry and flotation reagents. The complexity of the interactions between these factors often leads to uncertainty over whether the final grade/recovery results obtained in either laboratory or pilot scale tests are in fact the maximum recovery at a specific grade. The reason for this is that there has not previously been a general technique for establishing the floatability of an ore. This study describes the further development of the 'tree' flotation technique for minerals other than coal, and in particular its application to iron ores. Oxides have been chosen as a system of intermediate complexity between the simple coal system and sulphide minerals to illustrate the principles and develop the concepts. The 'tree' flotation procedure consists of the progressive flotation to completion of successive froth products, followed by reflotation to remove entrained material. It therefore represents an 'equilibrium' approach to floatability rather than a kinetic approach. By ordering the various products and tails in order of increasing grade, a cumulative curve of grade and recovery can be constructed against which an isolated batch or plant result on the same ore can be compared. In this investigation, a Jaspilitic iron ore was tested at various grind sizes to determine the 'best' flotation grade-recovery that could be obtained with a given set of reagent conditions. The separation characteristics of a process are best measured on a system which contains particles which behave as 'middlings' with respect to the process in question. For this reason a natural ore was chosen in preference to model systems in order to relate more readily to plant situations.

Jan 1, 1993

By K. N. Hebbar, R. G. Reddy

Spent potliners (SPL) were declared hazardous waste under RCRA (K088) in July, 1990. The glass formation characteristics of the SPL was studied. The SPL glassy matrix were analyzed using X-ray diffraction and optical microscopy. Results showed that SPL can be fixed in a glassy matrix with the addition of sand and limestone. The optimum amounts of additives were determined for obtaining the best glass formation characteristics.

Jan 1, 1995

In the five years since Great Central Mines Limited (GCM) commenced exploration in the Jundee and Bronzewing areas of Western Australia's Yandal greenstone belt, the Company has been transformed from a junior explorer into Australia's fourth largest gold producer with annual production of approximately 440 000 ounces and mineral resources of seven million ounces of gold.The growth in resources has been driven by a high quality geoscientific approach, supported by a substantial budget for drilling and strong management commitment. In 1997, the Company expects to spend US$30 million on exploration in the Yandal greenstone belt.

Jan 1, 1997

Arising from prospecting success, the underlying worth of the shares of a publicly listed mining exploration company can increase many-fold. Prompt and accurate reporting during the exploration stage is therefore essential. While there is scope for varying degrees of optimism or caution in statements about the future economic prospectivity of a mineral deposit which has been discovered, the directors of a mining exploration company have both a legal and ethical obligation to keep their shareholders and the general public fully informed as to the state of progress of, and significant factual results arising from its exploration efforts. Suggestions are made as to the desirable form and content of exploration reports up to and including the time when the orebody has been delineated in terms of assured tonnage and grade. The benefits which will flow from this greater disclosure are discussed.

Jan 1, 1979

Here, published for the first time, is the group of Anaconda officials (New York office) concerned with the planning and operations of the company's copper properties in Chile.

Jan 1, 1952

By Robert P. Kudlawiec

The use of Mobile Roof Supports (MRS) in pillar retreat mining has been a fairly recent occurrence in coal mining operations in the United States (1988). Determining the pillar block configuration, the crosscut and entry centers, the number of entries developed, the method of ventilation, and the type and mixture of equipment used arc all factors in establishing a successful pillar retreat operation. This paper will evaluate and report on the history of one coal company's relationship with MRS usage for pillar retreat mining and focus on the company's use of horizontal pillars (inverted-blocks) for the panel configuration.

Jan 1, 2000

By R. E. Le Messurier

GENERAL DESCRIPTION The mines are located at Broken Hill in the western part of New South Wales, Australia, 930 km west¬northwest of Sydney. Mining Methods Where pillars must be left between stopes, extraction of a block of ore between two or more levels is carried out in stages: 1) Stopes are mined overhand by horizontal cut¬and-fill stoping, or by long-hole stoping. The various methods of horizontal cut-and-fill stoping used are desig¬nated as: -Loader cut-and-fill stoping with horizontal blast¬holes and diesel load-haul-dump (LHD) units. -Open stoping with horizontal blastholes and com¬pressed air or electric scrapers, or with diesel or electric LHD units. Square-set timber stoping, where ground condition precludes open stoping. The backs are sup¬ported with timber square sets. Pattern rockbolting of the backs may be used as an intermediate stage between open stoping and square-set stoping. 2) Vertical pillars are mined by undercut-and-fill stoping or by vertical crater retreat stoping. 3) Where a horizontal pillar has been formed below the level above the primary stope, this level pillar, usually 6.1 to 8.2 m in depth, may be mined by over¬hand square-set stoping or by undercut-and-fill. Long-hole stoping is used at the Zinc Corp. (ZC) and New Broken Hill Consolidated (NBHC) to mine parts of the zinc-rich A and B lodes. Drilling is carried out from drill drives and, in some cases, sills. Hole sizes used are 165 mm (61/2 in.), 110 mm (4'h in.), and 65 mm (21/2 in.) nominal diam with hole lengths being limited to 50, 30, and 20 m respectively. Ammonium nitrate-fuel oil (ANFO) and water gel explosives are used. Broken ore is loaded from drawpoints at the bottom of the stope using rubber-tired diesel-driven LHD units which deliver ore to an orepass. Annual production at Zinc Corp. and NBHC accord¬ing to mining method is given in Table 1. At Zinc Corp. mining is being carried out at depths varying between 200 and 832 m. At NBHC it ranges from 528 to 915 m below the surface. The average travel time to the stope is 30 to 45 min. GENERAL ORE BODY REQUIREMENTS Size, Shape, and Dip There are six separate lodes which carry minable ore in the mines of Zinc Corp. and New Broken Hill Consolidated. The lowest of these and the main ore bodies presently being mined at Zinc Corp. are the lead lodes, consisting of a siliceous fluoritic ore body (No. 3 lens) and overlying it a calcite rhodonitic ore body (No. 2 lens). Each possesses characteristic ratios of lead, silver, and zinc, although the grade within each lens is variable, in places being as high as 30% Pb. There are also low¬grade portions which consist chiefly of poorly mineral¬ized rhodonitic material. No. 3 lens terminates within the Zinc Corp. leases, while No. 2 lens continues into the NBHC leases where it continues to provide a significant proportion of pro¬duction from the mine. Overlying the No. 2 lens are the various zinc-rich ore bodies. In ascending sequence these are lower No. 1 lens, upper No. 1 lens, A lode, and B lode. A typical assay for the small No. 1 lens group ore bodies is 8% lead, 50 g/t silver, and 20% zinc. The `A' lode is a large low-grade ore body in which the higher grade sections assay 4% lead, 30 g/t silver, and 10% zinc; larger quantities of lower grade ma¬terial also occur. B lode, the main zinc lode, typically assays 5% lead, 30 g/t silver, and 17% zinc. B lode increases in size as it extends south, and in NBHC is a major ore body, contributing about 52% of the production. All the lodes pitch south, the average pitch being 0.52 rad (30°) in the Zinc Corp. leases and rather flatter than this in the NBHC leases (see Figs. 1-3). The ground is all competent rock. Production requirements at Zinc Corp. are 900 000 t and 1 200 000 at NBHC.

Jan 1, 1982

By Jeanne A. Smith, Suzanne D. Smith

Annoyance, fatigue, and musculoskeletal pain have been reported during prolonged exposures to propulsion-generated vibration in military propeller aircraft1. The objective of this study was to determine the vibration mitigation properties of selected seat cushions and the effects of occupant seating posture during exposure to higher frequency multi-axis vibration associated with military propeller aircraft. Methods A Navy E-2C Hawkeye crew seat was mounted onto the Six Degree-of-Freedom Motion Simulator (SIXMODE). Six seat pan cushion configurations were tested during exposure to an E-2C vibration signal collected in the field1. Seat pan cushions 1 – 5 were used with the original E-2C seat back cushion. Cushion configuration 6 included seat pan cushion 5 with a prototype seat back cushion. Triaxial accelerometer pads were mounted onto the seat pan and seat back cushions to measure the vibration entering the human. Data were collected for seven subjects seated upright with their backs in contact with the seat (back-on) and not in contact with the seat (back-off). Spectral analysis techniques were used to analyze data at the two dominant frequencies associated with the propulsion system (propeller rotation frequency (PRF) ~18.5 Hz, and blade passage frequency (BPF) ~73.5 Hz). Overall accelerations were also calculated between 1 and 80 Hz. Vibration Total Values (VTVs) were calculated using the weighted seat pan and seat back (back-on only) accelerations and compared to the comfort reactions given in ISO 2631-1: 19972. Results In general, the highest accelerations observed at the seat pan occurred in the fore-and-aft (X) direction at both the PRF and the BPF for all cushions and both postures. The most pronounced effect was at the BPF in the X direction, where all configurations showed significantly lower seat pan accelerations than configuration 1 (original E-2C cushion) with the back-on posture. Configuration 5 was the exception with the back-off posture (Fig. 1A, Repeated Measures ANOVA, P<0.05). The most pronounced effect of posture occurred at the PRF in the X direction, where all cushion configurations showed significantly lower seat pan accelerations with the back-off posture (Fig. 1B). All configurations except configuration 2 showed similar VTVs as compared to Configuration 1 (Fig. 2, P<0.05). Configuration 2 tended to show the lowest weighted acceleration levels. The overall VTVs (back-on only, Fig. 2B) showed significantly higher accelerations as compared to both the back-on and back-off seat pan point VTVs (Figs. 2A &

Jan 6, 2006

By L Spencer, H Zwingmann, I Graham, D Cendon, B Kelly, D Burkett, F Lau, P Lennox

"An EXTENDED ABSTRACT is available for download. A full-length paper was not prepared for this presentation. The Kulumadau deposit represents an intermediate-sulfidation epithermal gold deposit (3.8 Mt at 2.3 g/t, Ag:Au = 1). Mineralisation is primarily confined to hydrothermal breccias within pre-existing fault zones, where it is disseminated throughout a hydrothermal matrix comprising chlorite-quartz-adularia-illite-I/S clays-calcite-pyrite. The host sequence represents numerous mid-Miocene pyroclastic flow eruptions within a tectonically active emergent shallow marine to subaerial depositional setting. Subsequent growth faulting was responsible for debris avalanches, which were subsequently cut by reverse faults. Faults were exploited by hydrothermal fluids, with the heightened porosity at the juncture between faults and debris material facilitating boiling of the ore constituents. Fluid inclusion studies suggest that fluid mixing between meteoric fluids and magmatic fluids, accompanied by boiling, were the primary mechanisms for gold deposition. The occurrence of anhydrite/gypsum as late-stage veins and their sulfur and oxygen isotopic values indicate post-mineralisation mixing of sea water with hydrothermal fluids.CITATION:Burkett, D, Graham, I, Spencer, L, Lennox, P, Cohen, D, Zwingmann, H, Lau, F, Kelly, B and Cendon, D, 2015. The Kulumadau epithermal breccia-hosted gold deposit, Woodlark Island, Papua New Guinea, in Proceedings PACRIM 2015 Congress, pp 205–212 (The Australasian Institute of Mining and Metallurgy: Melbourne)."

Mar 18, 2015

By d&apos, L. Berenbaum, F. Heurle, R. Rosenberg

The structure of aluminum films obtained by evaporation was studied by electron microscopy, mostly by replica techniques and X-ray diffraction. The resistivities and stress conditions of the films were also determined. Film properties were studied as a function of source selection, substrate type, residual pressures of oxygen and water vapor, substrate temperature, and rate of growth. The formation of abnormal localized growths and whiskers resulting from annealing treatment subsequent to deposition was investigated. Films deposited onto single-crystal substrates were found to be epitaxially 0riented; for such films, relative orientations between films and substrates were determined. ALTHOUGH wide use has been made of evaporated aluminum films for the formation of conducting lines on semiconductor devices, relatively little has been reported concerning the structural characteristics of such films.1"9 The purpose of this study was to obtain an overall view of the dependence of these characteristics on film deposition and subsequent annealing conditions, which were similar to those used in silicon planar technology. Accordingly, most of this study was carried out using oxidized and bare silicon wafers as substrates, although some work was also done using alkali halide, magnesium oxide, and mica substrates. However, the main concern remained pragmatic. Emphasis was given to the study of the effects of deposition and annealing conditions on film characteristics such as structure, resistivity, and stress. I) EXPERIMENTAL PROCEDURES The films which were investigated in this study were deposited in 18-in.-diam glass chambers which were connected to the usual type of trapped diffusion pumps filled with silicon oil. Through the use of liquid-nitrogen-cooled Meisner traps and titanium sublimation pumps placed inside the deposition chambers, the pressure could be lowered to the lower portion of the 10- I Torr range and little increase in pressure would occur during the deposition cycle. Unless described otherwise, the substrates were 1-in.-diam p-type silicon wafers having a resistivity of 10 ohm-cm. The wafers were oxidized in wet oxygen at 975°C followed by a short dry-oxygen exposure at the same tempertture to a total oxide thickness of approximately 6000A. The wafers, backed by a layer of gallium, were mounted onto molybdenum discs brazed to a copper block.10 The latter was heated by imbedded commercial cartridge heaters. The substrate temperature could be maintained to within +10°C of a prescribed temperature during film deposition. The search for a satisfactory source for the controlled evaporation of aluminum has led to the use of 1-in.-diam crucibles" machined from rods of a commercially available, refractory composite* of Bn and

Jan 1, 1969